Pressure port for ultrasonic transducer on cmos sensor
AssigneeButterfly Network, Inc.
InventorsKeith G. Fife, Jianwei Liu, Jungwook Yang, Joseph Lutsky
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Abstract
Micromachined ultrasonic transducers having pressure ports are described. The micromachined ultrasonic transducers may comprise flexible membranes configured to vibrate over a cavity. The cavity may be sealed, in some instances by the membrane itself. A pressure port may provide access to the cavity, and thus control of the cavity pressure. In some embodiments, an ultrasound device including an array of micromachined ultrasonic transducers is provided, with pressure ports for at least some of the ultrasonic transducers. The pressure ports may be used to control pressure across the array.
Claims20
An ultrasound device, comprising:
- an ultrasonic transducer, comprising a substrate and a membrane, wherein the substrate and membrane are positioned with a sealed cavity between them;
- and
- an access hole through the membrane and configured to provide access to the sealed cavity.
A micromachined ultrasonic transducer, comprising:
- a sealed cavity;
- and
- a pressure port configured to control a pressure of the sealed cavity.
Dependencies are inferred from the claim text.