Vibration rectification error correction circuit, physical quantity sensor module, structure monitoring device, and correction value adjustment method of vibration rectification error correction circuit

A correction value adjustment method of a vibration rectification error correction circuit, the circuit including:

• a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value,
• a frequency delta sigma modulation circuit for generating a frequency delta sigma modulation signal obtained by performing frequency delta sigma modulation on a reference signal using an operation signal based on the signal to be measured, and
• a second correction circuit that includes a first filter circuit provided on an output side of the frequency delta sigma modulation circuit and operating in synchronization with the operation signal and a second filter circuit provided on an output side of the first filter circuit and operating in synchronization with the reference signal to output a signal to the first correction circuit, and corrects the vibration rectification error based on a filter characteristic of the first filter circuit and a filter characteristic of the second filter circuit, the method comprising:
• adjusting a correction value of the correction function of the first correction circuit;
• and
• adjusting the filter characteristic of the first filter circuit and the filter characteristic of the second filter circuit of the second correction circuit, wherein
• the adjusting of the correction value is performed before the adjusting of the filter characteristic.