Base generator, reagent, organic salt, composition, method for manufacturing device, cured film and device

An organic salt represented by general formula (1), (2), (3) or (4)

• wherein:
• each of Z1 to Z5 in the general formulas (1) and (2), and each of Z6 to Z11 in the general formulas (3) and (4) represents:
• independently from each other, a hydrogen atom;
• a substituent group having an atom of group 16 element, an atom of group 15 element, an atom of group 14 element other than a carbon atom or a halogen atom;
• or a monovalent organic group, in the case of the monovalent organic group, at least two of Z1 to Z5 or at least two of Z6 to Z11 may be bonded via at least one atom;
• each of R1 to R4 in the general formulas (1) and (2), and each of R5 to R8 in the general formulas (3) and (4) represents a substituent group which may be the same or different from each other, and may have:
• a hydrogen atom;
• an atom of group 16 element;
• an atom of group 15 element;
• an atom of group 14 element other than a carbon atom;
• or a halogen atom;
• D in the general formulas (1) and (2), and L in the general formulas (3) and (4) represents:
• an atom of group 16 element;
• an atom of group 15 element;
• an atom of group 14 element other than a carbon atom a halogen atom;
• or a divalent organic group;
• each of E, G, M and Q represents:
• independently from each other, an atom of group 16 element;
• an atom of group 15 element;
• an atom of group 14 element other than a carbon atom a halogen atom;
• or a divalent organic group;
• and
• each of H, J, T and X represents:
• independently from each other, a hydrogen atom;
• an atom of group 16 element;
• an atom of group 15 element;
• an atom of group 14 element other than a carbon atom;
• a halogen atom;
• or a monovalent organic group.