# US 2019/0320501 A1 · All aluminum heater > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0320501 A1 - Document ID: US20190320501A1 - Status: Published application - Kind: A1 - Application number: 16/386,870 - Filed: 2019-04-17 - Published: 2019-10-17 - Earliest claimed: 2018-04-17 - Assignees: Watlow Electric Manufacturing Company - Applicants: Watlow Electric Manufacturing Company - Inventors: Patrick Margavio; Kurt English - Web page: https://patentgrep.com/patent/US20190320501A1 ## CPC - H05B 3/12: characterised by the composition or nature of the conductive material - H05B 3/265: {the insulating base being an inorganic material, e.g. ceramic (H05B3/262 takes precedence)} - H05K 1/0212: {Printed circuits or mounted components having integral heating means} - H05K 3/107: {by filling grooves in the support with conductive material (H05K3/045, H05K3/101, H05K3/1258 and H05K3/465 take precedence)} - H05K 3/4629: {laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets} - H05K 3/14: using spraying techniques to apply the conductive material {, e.g. vapour evaporation} - H10P 72/0432: {mainly by conduction} - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A heater includes a ceramic substrate and a heating layer made of aluminum material disposed in the ceramic substrate. The ceramic substrate includes a first plate member in which the heating layer is disposed and a second plate member through which a plurality of first vias made of the aluminum material extend. A routing layer made of the aluminum material can be disposed in the second plate member. The first plate member and the second plate member are bonded to each other by the aluminum material. The ceramic substrate can include a third plate member through which a plurality of second vias made from the aluminum material extend. The second plate member and the third plate member are bonded to each other by the aluminum material. Also, terminal wires can be bonded to the plurality of second vias. ## Claims ### Claim 1 A heater comprising: a ceramic substrate; and a heating layer consisting of an aluminum material. ### Claim 2 (depends on 1) The heater according to claim 1, further comprising a routing layer, and a plurality of first vias connecting the heating layer to the routing layer. ### Claim 3 (depends on 2) The heater according to claim 2, wherein the routing layer and the plurality of first vias are made of the aluminum material. ### Claim 4 (depends on 2) The heater according to claim 2, further comprising a plurality of second vias connecting the routing layer to a surface of the ceramic substrate, the plurality of second vias being made of the aluminum material. ### Claim 5 (depends on 1) The heater according to claim 1, wherein the ceramic substrate is made of aluminum nitride (AlN). ### Claim 6 (depends on 1) The heater according to claim 1, wherein the ceramic substrate includes a plurality of plate members that are bonded by the aluminum material. ### Claim 7 (depends on 6) The heater according to claim 6, wherein the plurality of plate members includes a first plate member, a second plate member through which a plurality of first vias extend, and the heating layer is disposed between the first plate member and the second plate member. ### Claim 8 (depends on 7) The heater according to claim 7, further comprising a routing layer disposed between the second plate member and a third plate member and in contact with the plurality of first vias. ### Claim 9 (depends on 6) The heater according to claim 6, wherein a surface roughness of adjacent surfaces of the plurality of plate members is between 100 nm and 5 μm. ### Claim 10 (depends on 6) The heater according to claim 6, wherein the plurality of plate members includes a first plate member, a second plate member through which a plurality of first vias extend, a third plate member through which a plurality of second vias extend, and the heating layer is disposed between the first plate member and the second plate member. ### Claim 11 (depends on 10) The heater according to claim 10 further comprising terminal wires bonded to the plurality of second vias. ### Claim 12 (depends on 10) The heater according to claim 10, further comprising a routing layer disposed between the second plate member and the third plate member and in contact with the plurality of first vias and the plurality of second vias. ### Claim 13 (depends on 12) The heater according to claim 12 further comprising terminal wires bonded to the plurality of second vias. ### Claim 14 A heater comprising: a ceramic substrate; and a heating layer consisting of an aluminum material disposed in the ceramic substrate, wherein the ceramic substrate includes a plurality of plate members that are bonded together by the aluminum material. ### Claim 15 (depends on 14) The heater according to claim 14, wherein the ceramic substrate is made of aluminum nitride (AlN). ### Claim 16 (depends on 14) The heater according to claim 14, wherein the plurality of plate members includes a first plate member in which the heating layer is disposed and a second plate member through which a plurality of first vias consisting of aluminum material extend. ### Claim 17 (depends on 14) The heater according to claim 14, wherein the plurality of plate members includes a first plate member in which the heating layer is disposed, a second plate member through which a plurality of first vias consisting of aluminum material extend, and a third plate member through which a plurality of second vias consisting of aluminum material extend. ### Claim 18 (depends on 17) The heater according to claim 17, further comprising a routing layer consisting of aluminum material disposed in the second plate member and in contact with the plurality of first vias and the plurality of second vias. ### Claim 19 A heater comprising: a ceramic substrate including a first plate member and a second plate member; a heating layer disposed in the first plate member; a routing layer and a plurality of first vias disposed in the second plate member; wherein the first plate member and the second plate member are made of aluminum nitride, the heating layer, the routing layer and the plurality of first vias are made of an aluminum material, and the first plate member and the second plate member are bonded together by the aluminum material. ### Claim 20 (depends on 19) The heater according to claim 19, wherein the ceramic substrate further comprises a third plate member through which a plurality of second vias consisting of aluminum material extend and the third plate member is bonded to the second plate member by the aluminum material in the plurality of second vias.