# US 2019/0320145 A1 · Assembly and method for inspecting components

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- Number: US 2019/0320145 A1
- Document ID: US20190320145A1
- Status: Published application
- Kind: A1
- Application number: 16/474,945
- Filed: 2017-02-02
- Published: 2019-10-17
- Earliest claimed: 2017-02-02
- Assignees: Ismeca Semiconductor Holding SA
- Applicants: Ismeca Semiconductor Holding SA
- Inventors: Jerome PARATTE; Pierrick ABRIAL; Thierry EME
- Web page: https://patentgrep.com/patent/US20190320145A1

## CPC

- G01N 21/95684: {Patterns showing highly reflecting parts, e.g. metallic elements}
- H04N 7/183: {for receiving images from a single remote source}
- G01N 21/8851: {Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002)}
- G06T 7/0002: {Inspection of images, e.g. flaw detection}
- H04N 23/54: Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
- H04N 23/64: {Computer-aided capture of images, e.g. transfer from script file into camera, check of taken image quality, advice or proposal for image composition or decision on when to take image}
- H05K 13/0813: {Controlling of single components prior to mounting, e.g. orientation, component geometry (H05K13/0812 takes precedence)}
- G01N 2201/025: Mechanical control of operations
- G06T 2207/30108: Industrial image inspection
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

## Abstract

According to the present invention there is provided a method of inspecting a component (10), using an assembly comprising a camera (3) with a fixed position, and a moveable stage (5), wherein the moveable stage is configured such that it can rotate about a rotation axis (7), and, can move linearly along two linear axes (9a, 9b) wherein said two linear axes are perpendicular to one another and wherein both of said two linear axes are each perpendicular to the rotation axis, the method comprising the steps of, (a) providing a first component into a predefined orientation on the stage, such that a first side of the component is facing a camera; (b) moving the stage linearly along one or more of said two linear axes so as to bring the first side of the first component into focus of the camera; (c) capturing an image of the first side of the first component after it has been brought into focus of the camera. An assembly according to the above comprising additionally a processor which is configured to determine whether the image of the component is in-focus of the camera, and if not, to determine a movement of the moveable stage and to initiate the moveable stage to undergo said determined movement so as to bring the component into focus is also provided.

## Claims

### Claim 1

A method of inspecting a component, using an assembly comprising a camera with a fixed position, and a moveable stage, wherein the moveable stage is configured such that it can rotate about a rotation axis, and, can move linearly along two linear axes wherein said two linear axes are perpendicular to one another and wherein both of said two linear axes are each perpendicular to the rotation axis, the method comprising the steps of, providing a first component into a predefined orientation on the stage, such that a first side of the component is facing a camera;
moving the stage linearly along one or more of said two linear axes so as to bring the first side of the first component into focus of the camera;
capturing an image of the first side of the first component after it has been brought into focus of the camera.

### Claim 2 (depends on 1)

A method according to claim 1 comprising the steps of, while maintaining the stage in the same position along the linear axes as when the image of the first side was captured, rotating the stage about said rotation axis so that a second side of the first component is facing the camera;
capturing an image of the second side of the first component after it has been brought into focus of the camera.

### Claim 3 (depends on 1)

A method according to claim 1 comprising the steps of, while maintaining the stage in the same position along the linear axes as when the image of the first side was captured, removing the first component from the stage;
providing a second component, which has the same dimensions as the first component, into a predefined orientation on the stage, such that a first side of the second component is facing a camera;
capturing an image of the first side of the second component using the camera;
rotating the stage about said rotation axis so that a second side of the second component is facing the camera;
capturing an image of the second side of the second component using the camera.

### Claim 4 (depends on 1)

A method according to any one of claims claim 1 wherein said first component is cube-shaped.

### Claim 5 (depends on 1)

A method according to claim 1 comprising the steps of,
storing, in a memory, first position data indicative of the position of the stage along said two linear axes, when the first side of the first component is in focus of the camera;
rotating the stage about said rotation axis so that a second side of the first component is facing the camera;
moving the stage linearly along one or more of said two linear axes so as to bring the second side of the first component into focus of the camera;
storing, in a memory, second position data indicative of the position of the stage along said two linear axes, when the second side of the first component is in focus of the camera;
capturing an image of the second side of the first component after it has been brought into focus of the camera.

### Claim 6 (depends on 5)

A method according to claim 5 comprising the steps of,
rotating the stage about said rotation axis so that a third side of the first component is facing the camera;
retrieving the first position data from the memory, and moving the stage to a position corresponding to the position indicated in the retrieved first position data, so as to bring the third side of the first component into focus;
capturing an image of the third side of the first component after it has been brought into focus of the camera;
rotating the stage about said rotation axis so that a fourth side of the first component is facing the camera;
retrieving the second position data from the memory, and moving the stage to a position corresponding to the position indicated in the retrieved second position data, so as to bring the fourth side of the first component into focus of the camera;
capturing an image of the fourth side of the first component after it has been brought into focus of the camera.

### Claim 7 (depends on 5)

A method according to any one of claims claim 5, comprising the steps of, removing the first component from the stage;
providing a second component, which has the same dimensions as the first component, into a predefined orientation on the stage, such that a first side of the second component is facing a camera;
capturing an image of the first side of the second component using the camera;
rotating the stage about said rotation axis so that a second side of the second component is facing the camera;
retrieving the second position data from the memory, and moving the stage to a position corresponding to the position indicated in the retrieved second position data, so as to bring the second side of the second component into focus of the camera;
capturing an image of the second side of the second component using the camera.

### Claim 8 (depends on 7)

A method according to claim 7 further comprising the step of retrieving the first position data from the memory, and moving the stage to a position corresponding to the position indicated in the retrieved first position data, so as to bring the first side of the second component into focus of the camera.

### Claim 9 (depends on 5)

A method according to claim 5 wherein said first component is rectangular-cuboid-shaped.

### Claim 10 (depends on 1)

A method according to claim 1 wherein the method further comprises the step of inspecting a captured image to identify if the side of the component has a crack or is contaminated.

### Claim 11 (depends on 5)

A method according to claim 5 comprising the step of, removing the first component from the stage, providing a second component which has dimensions which are different to the dimensions of the first component, into said predefined orientation on the stage such that a first side of the second component is facing a camera;
retrieving first position data from memory, and moving the stage to a position corresponding to the position indicated in the retrieved first position data;
capturing an image of the first side of the second component using the camera;
detecting from the captured image that the second component is out of the focus of the camera;
moving the stage linearly along one or more of said two linear axes so as to bring the first side of the second component into focus of the camera;
capturing an image of the first side of the second component after it has been brought into focus of the camera;
storing, in a memory, third position data indicative of the position of the stage along said two linear axes, when the first side of the second component is in focus of the camera;
rotating the stage about said rotation axis so that a second side of the second component is facing the camera;
moving the stage linearly along one or more of said two linear axes so as to bring the second side of the second component into focus of the camera;
storing, in a memory, fourth position data indicative of the position of the stage along said two linear axes, when the second side of the second component is in focus of the camera;
capturing an image of the second side of the second component after it has been brought into focus of the camera.
An assembly for inspecting a component, the assembly comprising, a camera having a fixed position; and
a moveable stage, wherein the moveable stage is configured such that it can rotate about a rotation axis, and, can move linearly along two linear axes wherein said two linear axes are perpendicular to one another and wherein both of said two linear axes are each perpendicular to the rotation axis;
a processor which is configured to, receive an image captured by the camera and to determined if the image is in-focus and, if the image is not in-focus then determines a movement of the moveable stage required to bring the component into focus of the camera, and to initiate the moveable stage to undergo said determined movement so as to bring the component into focus of the camera.