# US 2019/0319142 A1 · ZnO PHOTODETECTOR

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- Number: US 2019/0319142 A1
- Document ID: US20190319142A1
- Status: Published application
- Kind: A1
- Application number: 16/462,493
- Filed: 2017-11-21
- Published: 2019-10-17
- Earliest claimed: 2016-11-23
- Assignees: Georgetown University
- Applicants: Georgetown University
- Inventors: Jong-in Hahm; Daniel S. Choi; Matthew Hansen; Edward Van Keuren
- Web page: https://patentgrep.com/patent/US20190319142A1

## CPC

- H10F 77/1625: {Semiconductor nanoparticles embedded in semiconductor matrix}
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- H10F 30/10: the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
- H10F 71/1257: {comprising growth substrates not made of Group II-VI materials}
- H10F 77/123: comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
- H10F 77/1437: {Quantum wires or nanorods}
- H10F 77/20: Electrodes
- H10F 77/40: Optical elements or arrangements (surface textures H10F77/70)
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- B82Y 40/00: Manufacture or treatment of nanostructures
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

A device comprising: a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, wherein the device is configured for detecting light in the visible wavelength.

## Claims

### Claim 1

A device comprising:
a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, wherein the device is configured for detecting light in the visible wavelength.

### Claim 2 (depends on 1)

The device of claim 1, wherein the nanorods have a diameter of 305 to 395 nm.

### Claim 3 (depends on 1)

The device of claim 1, wherein the nanorods have an aspect ratio of greater than 15:1.

### Claim 4 (depends on 1)

The device of claim 1, wherein the nanorods have a length greater than 5 μm.

### Claim 5 (depends on 1)

The device of claim 1, wherein the gold nanoparticles have an average diameter of 10 nm.

### Claim 6 (depends on 1)

The device of claim 1, wherein the gold nanoparticles are applied onto the intertwined ZnO nanorods network.

### Claim 7 (depends on 1)

The device of claim 1, wherein the gold nanoparticles are embedded in the intertwined ZnO nanorods network.

### Claim 8 (depends on 1)

The device of claim 1, further comprising a support on which the intertwined ZnO nanorods network is disposed, and at least one electrical contact coupled to the intertwined ZnO nanorods network.

### Claim 9 (depends on 8)

The device of claim 8, wherein the support comprises Si.

### Claim 10 (depends on 8)

The device of claim 8, wherein the contact comprises Ag.

### Claim 11 (depends on 1)

The device of claim 1, wherein the ZnO is the form of wurtzite ZnO crystals.

### Claim 12 (depends on 1)

The device of claim 1, wherein the gold nanoparticles have a coverage density of 2×1011 nanoparticles/cm2 to 7×1011 nanoparticles/cm2.

### Claim 13 (depends on 1)

The device of claim 1, wherein the gold nanoparticles have an average diameter of 2 nm to 50 nm.

### Claim 14

A device comprising:
a plurality of gold nanoparticles deposited on a ZnO nanorods network, wherein the nanorods have an aspect ratio of greater than 15:1, and the gold nanoparticles have an average diameter of 10 nm.

### Claim 15

A method for making a visible light photodetector, comprising:
depositing a plurality of gold nanoparticles onto an intertwined ZnO nanorods network via solution processing.

### Claim 16 (depends on 15)

The method of claim 15, further comprising growing the ZnO nanorods network on a silicon wafer via chemical vapor deposition.

### Claim 17 (depends on 16)

The method of claim 16, further comprising placing at least one electrical contact onto the ZnO nanorods network.

### Claim 18 (depends on 15)

The method of claim 15, wherein the ZnO nanorods have an aspect ratio of greater than 15:1.

### Claim 19

A method for photodetecting light in the visible region of electromagnetic spectrum, comprising
illuminating a photodetector comprising a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, and
measuring at least one of a resulting photovoltage or a resulting photocurrent.