# US 2019/0318944 A1 · Expanding method and expanding apparatus

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- Number: US 2019/0318944 A1
- Document ID: US20190318944A1
- Status: Published application
- Kind: A1
- Application number: 16/376,391
- Filed: 2019-04-05
- Published: 2019-10-17
- Earliest claimed: 2018-04-12
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Shinichi FUJISAWA
- Web page: https://patentgrep.com/patent/US20190318944A1

## CPC

- H10P 72/0431: {Apparatus for thermal treatment}
- H10P 72/0442: {Apparatus for placing on an insulating substrate, e.g. tape}
- H10N 10/17: characterised by the structure or configuration of the cell or thermocouple forming the device
- H10P 54/00: Cutting or separating of wafers, substrates or parts of devices
- H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting}
- H10P 72/0434: {mainly by convection}
- H10P 72/70: for supporting or gripping
- H10W 72/071: {Connecting or disconnecting}
- H10P 72/742: {involving stretching of the auxiliary support post dicing}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

An expanding method includes a plate cooling step of cooing a plate of a cooling/heating unit, which includes the plate for contact with a workpiece and a Peltier element for cooling or heating the plate, a workpiece cooling step of bringing the plate into contact with the workpiece through the expansion sheet to cool the workpiece, after the plate cooling step is performed, an expanding step of expanding the expansion sheet, after the workpiece cooling step is performed, a plate heating step of heating the plate, after the expanding step is performed, and a workpiece heating step of bringing the plate into contact with the workpiece through the expansion sheet to heat the workpiece, after the plate heating step is performed.

## Claims

### Claim 1

An expanding method for expanding an expansion sheet to which a workpiece including at least a ductile material is adhered, the expanding method comprising:
a plate cooling step of cooling a plate of cooling/heating means, which includes the plate having a contact surface for contact with the workpiece and a Peltier element for cooling or heating the plate, to a temperature to which to cool the workpiece;
a workpiece cooling step of bringing the plate into contact with the workpiece through the expansion sheet to cool the workpiece, after the plate cooling step is performed;
an expanding step of expanding the expansion sheet, after the workpiece cooling step is performed;
a plate heating step of heating the plate, after the workpiece cooling step is performed; and
a workpiece heating step of bringing the plate into contact with the workpiece through the expansion sheet to heat the workpiece, after the expanding step and the plate heating step are performed.

### Claim 2

An expanding apparatus for expanding an expansion sheet to which a workpiece including at least a ductile material is adhered, the expanding apparatus comprising:
expanding means expanding the expansion sheet;
cooling/heating means that includes a plate having a contact surface for contact with the workpiece and brought into contact with the workpiece through the expansion sheet, and a Peltier element for cooling or heating the plate; and
polarity change-over means changing over the polarity of a current passed to the Peltier element.