# US 2019/0318909 A1 · Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0318909 A1 - Document ID: US20190318909A1 - Status: Published application - Kind: A1 - Application number: 16/379,807 - Filed: 2019-04-10 - Published: 2019-10-17 - Earliest claimed: 2018-04-12 - Assignees: Von Ardenne Asset GmbH & Co. KG - Applicants: VON ARDENNE Asset GmbH & Co. KG - Inventors: Carsten DEUS - Web page: https://patentgrep.com/patent/US20190318909A1 ## CPC - H01J 37/3053: {for evaporating or etching} - C23C 14/30: by electron bombardment - C23C 14/54: Controlling or regulating the coating process - H01J 37/1475: {magnetic} - H01J 37/3023: {Program control} - H01J 2237/1526: For X-Y scanning - H01J 2237/30488: Raster scan - H01J 2237/3132: Evaporating - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density. ## Claims ### Claim 1 An electron beam vaporizer for vaporizing a vaporization material, the electron beam vaporizer comprising: an electron beam source for generating an electron beam; a deflection device for deflecting the electron beam; a ring crucible having a passage opening; a rod, which is arranged at least in portions in the passage opening and comprises the vaporization material, wherein an outer edge of the rod adjoins an inner edge of the ring crucible; and a control device for controlling the deflection of the electron beam by means of the deflection device, wherein the control device is configured in such a way that a first deflection pattern and a second deflection pattern are generated by means of the electron beam, wherein the first deflection pattern has a lower power density than the second deflection pattern, wherein the first deflection pattern is generated at least on the rod and wherein the second deflection pattern is generated on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible. ### Claim 2 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the inner edge of the ring crucible extends along an intersection line between an exposed ring end face of the ring crucible and an inner wall of the ring crucible; and wherein the outer edge of the rod extends along an intersection line between an exposed end face of the rod and an outer wall of the rod. ### Claim 3 (depends on 2) The electron beam vaporizer as claimed in claim 2, wherein a gap between the inner wall of the ring crucible and the outer wall of the rod has a gap width of less than 1 cm. ### Claim 4 (depends on 1) The electron beam vaporizer as claimed in claim 1, further comprising: a thrust device, which is configured in such a way that the rod can be pushed by means of the thrust device at a predefined speed into the passage opening of the ring crucible. ### Claim 5 (depends on 4) The electron beam vaporizer as claimed in claim 4, wherein the thrust device is configured in such a way that the predefined speed is in a range of approximately 0.1 millimeters per minute to approximately 10 millimeters per minute. ### Claim 6 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the control device is configured in such a way that the second deflection pattern is generated at least once on each portion of the outer edge of the rod and on each portion of the inner edge of the ring crucible within a predefined duration, Vrod. ### Claim 7 (depends on 6) The electron beam vaporizer as claimed in claim 6, wherein the predefined duration is in a range of approximately 0.1 minutes to approximately 60 minutes. ### Claim 8 (depends on 6) The electron beam vaporizer as claimed in claim 6, wherein the predefined duration is in a range of approximately 0.1 mm/Vrod to approximately 50 mm/Vrod. ### Claim 9 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the second deflection pattern comprises at least one electron beam spot which is located both on the portion of the outer edge of the rod and also on the portion of the inner edge of the ring crucible. ### Claim 10 (depends on 9) The electron beam vaporizer as claimed in claim 9, wherein the electron beam spot has a width or a diameter in a range of approximately 0.5 cm to approximately 2 cm. ### Claim 11 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the portion of the outer edge of the rod comprises a proportion of less than 25% of the overall outer edge and wherein the portion of the inner edge of the ring crucible comprises a proportion of less than 25% of the overall inner edge. ### Claim 12 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the control device is configured in such a way that the first deflection pattern is formed n times in succession, and subsequently the second deflection pattern is formed m times in succession, where n and m are each natural numbers. ### Claim 13 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the control device is configured in such a way that, in a first pass, the first deflection pattern is formed at least once and subsequently the second deflection pattern is formed at least once and, in a second pass, the first deflection pattern is formed at least once and subsequently the second deflection pattern is formed at least once, wherein the second deflection pattern has a different position in the second pass than in the first pass. ### Claim 14 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the control device is configured in such a way that, in multiple passes, the first deflection pattern is formed at least once and subsequently the second deflection pattern is formed at least once in each case per pass; wherein the second deflection pattern has various positions during the multiple passes, wherein the various positions are arranged along a closed path. ### Claim 15 (depends on 13) The electron beam vaporizer as claimed in claim 13, wherein the formation of the respective individual first deflection pattern is performed within a predefined duration of less than 100 ms and/or wherein the formation of the respective second deflection pattern is performed within a predefined duration of less than 100 ms. ### Claim 16 (depends on 14) The electron beam vaporizer as claimed in claim 14, wherein the multiple passes take place within a predefined duration in a range of approximately 0.5 minutes to approximately 300 minutes. ### Claim 17 (depends on 14) The electron beam vaporizer as claimed in claim 14, wherein the multiple passes take place within a predefined duration in a range of approximately 1 mm/Vrod to approximately 50 mm/Vrod. ### Claim 18 (depends on 1) The electron beam vaporizer as claimed in claim 1, wherein the vaporization material is a ceramic material. ### Claim 19 A method for vaporizing a vaporization material by means of an electron beam, wherein the vaporization material is arranged in the form of a rod in a passage opening of a ring crucible, wherein an outer edge of the rod adjoins an inner edge of the ring crucible, the method comprising: alternately generating a first deflection pattern and a second deflection pattern by means of deflection of the electron beam, wherein the first deflection pattern has a lower power density than the second deflection pattern, wherein the first deflection pattern is generated at least on the rod, and wherein the second deflection pattern is generated on a portion of the outer edge of the rod and on a portion of the inner edge of the ring crucible. ### Claim 20 A method for vaporizing a vaporization material by means of an electron beam, the method comprising: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.