# US 2019/0318193 A1 · Electron channeling pattern acquisition from small crystalline areas > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0318193 A1 - Document ID: US20190318193A1 - Status: Published application - Kind: A1 - Application number: 16/455,141 - Filed: 2019-06-27 - Published: 2019-10-17 - Earliest claimed: 2017-01-24 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Stephen W. Bedell; Kunal Mukherjee; John A. Ott; Devendra K. Sadana; Brent A. Wacaser - Web page: https://patentgrep.com/patent/US20190318193A1 ## CPC - G06V 20/693: {Acquisition} - G06T 7/33: using feature-based methods - G06T 11/60: Creating or editing images; Combining images with text - H01J 37/222: {Image processing arrangements associated with the tube} - H01J 37/292: {using scanning ray} - G06T 2200/32: involving image mosaicing - G06T 2207/10016: Video; Image sequence - G06T 2207/10061: from scanning electron microscope - G06T 2207/30148: Semiconductor; IC; Wafer - G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A method for crystal analysis includes identifying a crystalline region on a device where an electronic channeling pattern is needed to be determined, acquiring a whole image for each of a plurality of different positions for the crystalline region using a scanning electron microscope (SEM) as the crystalline region is moved to different positions. Relevant regions are extracted from the whole images. The images of the relevant regions are stitched together to form a composite map of a full electron channeling pattern representative of the crystalline region wherein the electronic channeling pattern is provided due to an increase in effective angular range between a SEM beam and a surface of the crystal region. ## Claims ### Claim 1 A method for crystal analysis, comprising: acquiring a whole image for each of a plurality of different positions for a crystalline region using a scanning electron microscope (SEM) as the crystalline region is moved to different positions; stitching the whole images of relevant positions of the plurality of different positions together to form a composite map of a full electron channeling pattern representative of the crystalline region, wherein the electronic channeling pattern is provided due to an increase in effective angular range between a SEM beam and a surface of the crystal region. ### Claim 2 (depends on 1) The method as recited in claim 1, wherein the crystalline region is smaller than an area needed to view a full electronic channeling pattern for the device. ### Claim 3 (depends on 1) The method as recited in claim 1, wherein the crystalline region is buried below a thickness of non-crystalline material and acquiring the whole image includes acquiring the whole image through the non-crystalline material. ### Claim 4 (depends on 1) The method as recited in claim 1, wherein acquiring the whole image includes stepping through different positions using a stepper motor to change positions in at least two dimensions. ### Claim 5 (depends on 1) The method as recited in claim 1, wherein acquiring the whole image includes acquiring the whole image at a plurality of different exposed crystal regions on a same substrate or wafer. ### Claim 6 (depends on 1) The method as recited in claim 1, wherein acquiring the whole image includes acquiring the whole image for a crystalline region of cross-sectioned device. ### Claim 7 (depends on 1) The method as recited in claim 1, wherein the composite map displays a full electronic channeling pattern for the device. ### Claim 8 (depends on 1) The method as recited in claim 1, wherein the composite map identifies crystal structure and orientation of the device. ### Claim 9 A method for crystal analysis, comprising: stepping through a plurality of positions for the crystalline region by adjusting a location where a sample is located while a scanning electron microscope (SEM) image is to be taken; acquiring a whole image for each of the plurality of different positions of the crystalline region using the SEM; processing the whole images to stitch together a composite map of the crystalline region at different locations; and displaying a full electronic channeling pattern on a display. ### Claim 10 (depends on 9) The method as recited in claim 9, wherein the crystalline region is smaller than an area needed to view a full electronic channeling pattern for the device. ### Claim 11 (depends on 9) The method as recited in claim 9, wherein the crystalline region is buried below a thickness of non-crystalline material and acquiring the whole image includes acquiring the whole image through the non-crystalline material. ### Claim 12 (depends on 9) The method as recited in claim 9, wherein stepping includes stepping through different positions using a stepper motor to change positions in at least two dimensions. ### Claim 13 (depends on 9) The method as recited in claim 9, wherein acquiring the whole image includes acquiring the whole image at a plurality of different exposed crystalline regions on a same substrate or wafer. ### Claim 14 (depends on 9) The method as recited in claim 9, wherein acquiring the whole image includes acquiring the whole image for a crystalline region of cross-sectioned device. ### Claim 15 (depends on 9) The method as recited in claim 9, wherein the composite map identifies a crystal structure and orientation of the device. ### Claim 16 A crystal analysis system, comprising: a scanning electron microscope (SEM) configured to: step through a plurality of positions for the crystalline region by adjusting a location where a sample is located, and acquire a whole image for each of the plurality of different positions of the crystalline region using the SEM; a processing unit configured to process the whole images to stitch together a composite map of the crystalline region at different locations; and a display device configured to display a full electronic channeling pattern. ### Claim 17 (depends on 16) The system as recited in claim 16, wherein the crystalline region is buried below a thickness of non-crystalline material and acquiring the whole image includes acquiring the whole image through the non-crystalline material. ### Claim 18 (depends on 16) The system as recited in claim 16, wherein the SEM includes a stepper motor to change positions in at least two dimensions to step through the plurality of positions. ### Claim 19 (depends on 16) The system as recited in claim 16, wherein the whole image is acquired at a plurality of different exposed crystalline regions on a same substrate or wafer. ### Claim 20 (depends on 16) The system as recited in claim 16, wherein the composite map identifies a crystal structure and orientation of the device.