# US 2019/0316248 A1 · Film-forming apparatus, method for producing film-formed product using same, and cooling panel > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0316248 A1 - Document ID: US20190316248A1 - Status: Published application - Kind: A1 - Application number: 16/467,174 - Filed: 2017-11-16 - Published: 2019-10-17 - Earliest claimed: 2016-12-07 - Assignees: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) - Applicants: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) - Inventors: Hirofumi FUJII; Takeshi SUZUKI - Web page: https://patentgrep.com/patent/US20190316248A1 ## CPC - C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target} - C23C 14/325: {Electric arc evaporation} - C23C 14/541: {Heating or cooling of the substrates} - H01J 37/3435: {Target holders (includes backing plates and endblocks)} - H01J 2237/002: Cooling arrangements - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A film-forming apparatus having a simple and downsized structure is provided. The film-forming apparatus includes at least one target having an opposing face that opposes a substrate, a plurality of target holders each detachably holding the target, a cooling unit that cools a plurality of the target holders, and at least one cooling panel. The at least one cooling panel includes a held part held by the target holder, and a heat receiving part having a heat receiving face that opposes the substrate with the held part held by the target holder and receives radiation heat emitted from the substrate. The held part transfers heat from the heat receiving face to the target holder. Each target holder selectively holds the target or the cooling panel. ## Claims ### Claim 1 A film-forming apparatus comprising: a film forming chamber; a substrate supporting part that supports a substrate inside the film forming chamber; at least one target having an opposing face that opposes the substrate held by the substrate supporting part; a plurality of target holders each configured to detachably hold the target so that the opposing face of the target opposes the substrate; a cooling unit that cools the plurality of target holders; and at least one cooling panel, wherein the at least one cooling panel includes a held part having a shape enabling the held part to be detachably held by the target holder, and a heat receiving part having a heat receiving face that opposes the substrate in a state where the held part is held by the target holder and receives radiation heat emitted from the substrate, and the held part transfers heat from the heat receiving face to the target holder and each of the plurality of target holders selectively holds the target or the held part of the cooling panel. ### Claim 2 (depends on 1) The film-forming apparatus according to claim 1, wherein the heat receiving face has an area larger than an area of a substrate opposing portion of the target holder, the substrate opposing portion opposing the substrate. ### Claim 3 (depends on 1) The film-forming apparatus according to claim 1, wherein the cooling unit is configured to continuously supply a coolant to the target holder to cool the target holder, and the target holder is internally formed with a coolant path allowing the coolant supplied to the target holder to flow therein. ### Claim 4 (depends on 3) The film-forming apparatus according to claim 3, wherein the held part of the cooling panel has a protruding portion protruding in a direction different from a normal direction normal to the heat receiving face, and the target holder has a main body formed with the coolant path and a securing part that engages with the protruding portion to secure the held part onto the main body while pushing the held part against the main body. ### Claim 5 (depends on 1) A method for producing a film-formed product by forming a film on a surface of a substrate with particles discharged from a target, the method comprising: a preparation step of preparing the film-forming apparatus according to claim 1; a selection step of selecting at least one first target holder and at least one second target holder among the plurality of target holders of the film-forming apparatus, making the first target holder hold a target and making the second target holder hold the cooling panel; and a film forming step of forming a film on the surface of the substrate with particles of a film-forming material discharged from the opposing face of the target held by the first target holder and absorbing radiation heat emitted from the substrate by the cooling panel held by the second target holder while the cooling panel is cooled by the cooling unit via the second target holder. ### Claim 6 A cooling panel held by one target holder of a plurality of target holders of a film-forming apparatus including a film forming chamber, a substrate supporting part that supports a substrate inside the film forming chamber, at least one target having an opposing face that opposes the substrate, the plurality of target holders each configured to detachably hold the target, and a cooling unit that cools the plurality of target holders, the target holder selectively holding the target or the cooling panel, the cooling panel comprising: a held part having a shape enabling the held part to be detachably held by the target holder; and a heat receiving part having a heat receiving face that opposes the substrate in a state where the held part is held by the target holder and receives radiation heat emitted from the substrate, wherein the held part is configured to be held by the target holder so that the radiation heat received by the heat receiving face is transferred to the target holder holding the held part. ### Claim 7 (depends on 2) A method for producing a film-formed product by forming a film on a surface of a substrate with particles discharged from a target, the method comprising: a preparation step of preparing the film-forming apparatus according to claim 2; a selection step of selecting at least one first target holder and at least one second target holder among the plurality of target holders of the film-forming apparatus, making the first target holder hold a target and making the second target holder hold the cooling panel; and a film forming step of forming a film on the surface of the substrate with particles of a film-forming material discharged from the opposing face of the target held by the first target holder and absorbing radiation heat emitted from the substrate by the cooling panel held by the second target holder while the cooling panel is cooled by the cooling unit via the second target holder. ### Claim 8 (depends on 3) A method for producing a film-formed product by forming a film on a surface of a substrate with particles discharged from a target, the method comprising: a preparation step of preparing the film-forming apparatus according to claim 3; a selection step of selecting at least one first target holder and at least one second target holder among the plurality of target holders of the film-forming apparatus, making the first target holder hold a target and making the second target holder hold the cooling panel; and a film forming step of forming a film on the surface of the substrate with particles of a film-forming material discharged from the opposing face of the target held by the first target holder and absorbing radiation heat emitted from the substrate by the cooling panel held by the second target holder while the cooling panel is cooled by the cooling unit via the second target holder. ### Claim 9 (depends on 4) A method for producing a film-formed product by forming a film on a surface of a substrate with particles discharged from a target, the method comprising: a preparation step of preparing the film-forming apparatus according to claim 4; a selection step of selecting at least one first target holder and at least one second target holder among the plurality of target holders of the film-forming apparatus, making the first target holder hold a target and making the second target holder hold the cooling panel; and a film forming step of forming a film on the surface of the substrate with particles of a film-forming material discharged from the opposing face of the target held by the first target holder and absorbing radiation heat emitted from the substrate by the cooling panel held by the second target holder while the cooling panel is cooled by the cooling unit via the second target holder.