# US 2019/0314934 A1 · System and method for laser beveling and/or polishing

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- Number: US 2019/0314934 A1
- Document ID: US20190314934A1
- Status: Published application
- Kind: A1
- Application number: 16/422,558
- Filed: 2019-05-24
- Published: 2019-10-17
- Earliest claimed: 2014-08-28
- Assignees: Ipg Photonics Corporation
- Applicants: IPG Photonics Corporation
- Inventors: Jeffrey P. Sercel; Marco Mendes; Rouzbeh Sarrafi; Joshua Schoenly; Xiangyang Song; Mathew Hannon; Miroslaw Sokol
- Web page: https://patentgrep.com/patent/US20190314934A1

## CPC

- B23K 26/361: for deburring or mechanical trimming (B23K26/351 takes precedence)
- B23K 26/0624: {using ultrashort pulses, i.e. pulses of 1 ns or less}
- B23K 26/082: Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K 26/0823: {Devices involving rotation of the workpiece}
- B23K 26/0853: {Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane}
- B23K 26/354: by melting
- B23K 26/3576: {Diminishing rugosity, e.g. by grinding, polishing or smoothing}
- B23K 26/38: by boring or cutting
- B23K 26/402: involving non-metallic material, e.g. isolators
- B23K 2103/50: {Inorganic materials other than metals or composite materials}
- B23K 2103/52: {Ceramics}
- B23K 2103/54: {Glass}
- B23K 2103/56: {being semiconducting}
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM

## Abstract

Laser processing of hard dielectric materials may include cutting a part from a hard dielectric material using a continuous wave laser operating in a quasi-continuous wave (QCW) mode to emit consecutive laser light pulses in a wavelength range of about 1060 nm to 1070 nm. Cutting using a QCW laser may be performed with a lower duty cycle (e.g., between about 1% and 15%) and in an inert gas atmosphere such as nitrogen, argon or helium. Laser processing of hard dielectric materials may further include post-cut processing the cut edges of the part cut from the dielectric material, for example, by beveling and/or polishing the edges to reduce edge defects. The post-cut processing may be performed using a laser beam with different laser parameters than the beam used for cutting, for example, by using a shorter wavelength (e.g., 193 nm excimer laser) and/or a shorter pulse width (e.g., picosecond laser).

## Claims

### Claim 1

A method for post-cut processing cut edges of a part, the method comprising:
providing a cut part having cut edges with edge defects, wherein the cut part was cut from a hard dielectric material using a first laser beam;
generating a second laser beam with parameters capable of providing sufficient absorption in the hard dielectric material to modify the material such that the edge defects are reduced, wherein the second laser beam has a shorter wavelength and/or a shorter pulse width than the first laser beam; and
moving the cut part and the second laser beam relative to each other such that the second laser beam post-cut processes the edges of the part to reduce the edge defects.

### Claim 2 (depends on 1)

The method of claim 1 wherein the first laser beam is generated by an IR single mode fiber laser operating in a quasi-continuous wave (QCW) mode, and wherein the second laser beam is generated by a green fiber laser.

### Claim 3 (depends on 1)

The method of claim 1 wherein the first laser beam is generated by an IR single mode fiber laser operating in a quasi-continuous wave (QCW) mode, and wherein the second laser beam is generated by an ultrafast laser.

### Claim 4 (depends on 1)

The method of claim 1 further comprising directing the second laser beam such that the second laser beam is angled with an angle of incidence that is greater than 0° and less than the critical angle.

### Claim 5 (depends on 1)

The method of claim 1 further comprising providing a first laser to generate the first laser beam.

### Claim 6 (depends on 5)

The method of claim 5 wherein the first laser is an IR single mode fiber laser operating in a quasi-continuous wave (QCW) mode.

### Claim 7 (depends on 5)

The method of claim 5 further comprising providing a second laser to generate the second laser beam.

### Claim 8 (depends on 7)

The method of claim 7 wherein the second laser is an excimer laser.

### Claim 9 (depends on 7)

The method of claim 7 wherein the second laser is an ultrafast laser.

### Claim 10 (depends on 9)

The method of claim 9 wherein the second laser beam generated by the ultrafast laser has a wavelength in the IR range, the green range or the UV range.

### Claim 11 (depends on 7)

The method of claim 7 wherein the second laser is a fiber laser configured to generate the second laser beam with a wavelength in the green range.

### Claim 12 (depends on 1)

The method of claim 1 wherein the second laser beam post-cut processes the edges of the part by ablating material at the edges of the part.

### Claim 13 (depends on 1)

The method of claim 1 wherein the second laser beam post-cut processes the edges of the part by melting material at the edges of the part.

### Claim 14 (depends on 1)

The method of claim 1 wherein the second laser beam post-cut processes the edges of the part by beveling the edges of the part to form rounded bevels.

### Claim 15 (depends on 1)

The method of claim 1 further comprising directing the second laser beam such that the second laser beam is angled with an angle of incidence that is greater than 0° and less than the critical angle, wherein moving the cut part includes moving the cut part with coordinated motion in multiple axes relative to the angled laser beam.

### Claim 16 (depends on 15)

The method of claim 15 wherein moving the cut part relative to the angled laser beam changes an orientation of the angled laser beam relative to an edge of the cut part to change a cut angle of the laser beam at the edge of the part while the laser angle remains the same.

### Claim 17 (depends on 16)

The method of claim 16, wherein the cut angle of the laser beam is changed within a range of cut angles to form a rounded bevel on at least a portion of the edge of the part.

### Claim 18 (depends on 1)

The method of claim 1 wherein the part is circular.