# US 2019/0314922 A1 · Method of Manufacturing Radio Frequency (RF) Coil Multi-Driven RF Based-Ve Ion Source

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- Number: US 2019/0314922 A1
- Document ID: US20190314922A1
- Status: Published application
- Kind: A1
- Application number: 16/058,195
- Filed: 2018-08-08
- Published: 2019-10-17
- Earliest claimed: 2018-04-13
- Assignees: Institute for Plasma Research
- Applicants: Institute for Plasma Research
- Inventors: Jaydeep Joshi; Chandra Mouli Rotti; Arun Kumar Chakraborty; Mainak Bandyopadhyay; Agrajit Gahlaut; Milind Kumar Patel; Venkata Nagaraju Muvvala; Deepak Kumar Parmar
- Web page: https://patentgrep.com/patent/US20190314922A1

## CPC

- B23K 9/167: and of a non-consumable electrode
- H01F 41/10: Connecting leads to windings (making electric connections in general H01R43/00)
- C25D 3/38: of copper
- H01F 27/2876: {Cooling (cooling transformers and inductances in general H01F27/08)}
- H01F 27/16: Water cooling
- H01J 37/3211: {Antennas, e.g. particular shapes of coils}
- H01J 2237/08: Ion sources
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source includes the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding process.

## Claims

### Claim 1

A method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of:
a) manufacturing a tube using stainless steel grade as a substrate material;
b) coating the tube; and
c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding.

### Claim 2 (depends on 1)

The method as claimed in claim 1, wherein the RF coil for multi driver RF ion source which is joined to each other in series is further joined to water circuits disposed at an end, by orbital TIG welding.

### Claim 3 (depends on 1)

The method as claimed in claim 1, wherein the method achieves full penetration welding and can be inspected 100% volumetrically.

### Claim 4 (depends on 1)

The method as claimed in claim 1, wherein the RF coil produced by the method meets electrical requirements of inductance at 1 MHz frequency.

### Claim 5 (depends on 1)

The method as claimed in claim 1, wherein a layer thickness of the coating is between 150 to 200 microns.

### Claim 6 (depends on 1)

The method as claimed in claim 1, wherein a layer of copper coating is without presence of porosity.

### Claim 7 (depends on 1)

The method as claimed in claim 1, wherein a surface roughness of the RF coil is better than 6.3 microns Ra.

### Claim 8 (depends on 1)

The method as claimed in claim 1, wherein an adhesion of a cu-layer with the substrate material is found in line with a requirement of category 5B as per ASTM D 3359 guidelines.

### Claim 9 (depends on 1)

The method as claimed in claim 1, wherein the RF coil for multi driver RF ion source is a self-stable structure and does not require inter-turn spacers to maintain an isolation gap.