Transport Path Correction Techniques and Related Systems, Methods and Devices

An electronic product manufacturing apparatus, comprising:

• a deposition source to deposit a material on a substrate;
• a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon;
• and
• a substrate transport system, comprising:
• a memory to store predetermined data
• a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction,
• a second component to selectively engage the substrate so as to transport the substrate in the first direction, and
• at least one substrate transport actuator coupling the first component and the second component, the at least one substrate transport actuator to displace the second component in a second direction orthogonal to the first direction;
• wherein the at least one substrate transport actuator adjusts position of the second component in the second direction as the second component travels along the first direction.

An electronic product manufacturing apparatus, comprising:

• a deposition source to deposit a material on a substrate;
• a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon;
• and
• a substrate transport system comprising
• a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction,
• a second component to selectively engage the substrate so as to transport the substrate in the first direction, and
• at least two substrate transport actuators coupling the first component and the second component, the at least two substrate transport actuators to displace the second component in a second direction orthogonal to the first direction;
• wherein the at least two substrate transport actuators adjust position of the second component in the second direction as the second component travels along the first direction so as to cause the second component to travel along a straight line in the first direction.

An electronic product manufacturing apparatus, comprising:

• a deposition source to deposit a material on a substrate;
• a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon;
• and
• a substrate transport system comprising
• a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction;
• a second component to selectively engage the substrate so as to transport the substrate in the first direction in a plane of conveyance while the material is being deposited thereon;
• and
• at least one substrate transport actuator coupling the first component and the second component, the at least one substrate transport actuator to displace the second component in a second direction orthogonal to the first direction and parallel to the plane of conveyance;
• wherein the at least one substrate transport actuator adjusts position of the second component in the second direction as the second component travels along the first direction so as to cause the second component to travel along a straight line in the first direction.