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US 2019/0296712 A1Published application
Resonance device
AssigneeMurata Manufacturing Co., Ltd.
InventorsToshihiko Unami, Toshio Nishimura
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Abstract
A resonance device with improved precision of temperature control. The resonance device includes a platform; a resonator including a vibrator and one or more holding arms that connect the vibrator and the platform to each other such that a first groove is provided around the vibrator. Moreover, the resonance device includes a sensor with a measurement portion that measures temperature and a heater formed on the platform. A second groove is provided between the measurement portion and the heater.
Claims20
A resonance device comprising:
- a platform;
- a resonator including a vibrator and at least one first holding arm that connects the vibrator to the platform such that a first groove extends around the vibrator;
- a sensor including a measurement portion configured to measure temperature;
- and
- at least one heater disposed on the platform,
- wherein a second groove extends between the measurement portion and the at least one heater.
3 more elements
A resonance device comprising:
- a platform;
- a resonator including a vibrator and a pair of first holding arm that connect the vibrator to the platform with a first groove extending around the vibrator;
- a temperature sensor including a pair of second holding arms that connect the temperature sensor to the platform with a second groove extending around the temperature sensor;
- and
- at least one heater disposed on the platform,
- wherein the second groove is disposed between the temperature sensor and the at least one heater to reduce heat conductance to the temperature sensor.
3 more elements
Dependencies are inferred from the claim text.