Solar cell
AssigneeLG Electronics Inc.
InventorsJaewoo CHOI, Chungyi KIM, Joohyun KOH
Life of this patent
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Abstract
A solar cell includes a semiconductor substrate; a conductive region on or at the semiconductor substrate; an electrode electrically connected to the conductive region; and a silicon oxynitride layer on a light incident surface of the semiconductor substrate, wherein the silicon oxynitride layer comprises a first phase region having a first oxygen content and a first nitrogen content; a second phase region having a second oxygen content higher than the first oxygen content and a second nitrogen content lower than the first nitrogen content; and a third phase region having a third oxygen content lower than the second oxygen content and a third nitrogen content lower than the second nitrogen content.
Claims21
A solar cell, comprising:
- a semiconductor substrate;
- a conductive region on or at the semiconductor substrate;
- an electrode electrically connected to the conductive region;
- and
- a silicon oxynitride layer on a light incident surface of the semiconductor substrate,
- wherein the silicon oxynitride layer comprises:
- a first phase region having a first oxygen content and a first nitrogen content;
- a second phase region having a second oxygen content higher than the first oxygen content and a second nitrogen content lower than the first nitrogen content;
- and
- a third phase region having a third oxygen content lower than the second oxygen content and a third nitrogen content lower than the second nitrogen content.
Dependencies are inferred from the claim text.