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US 2019/0296160 A1Published application
Integrated graphene detectors with waveguides
AssigneeGlobalfoundries Inc.
InventorAjey P. JACOB
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.
Claims14
A method comprising:
- forming a plurality of non-planar waveguide fin structures from substrate material;
- forming material on the non-planar waveguide fin structures;
- and
- thermally decomposing the material to form a non-planar sheet of graphene material extending over each of the plurality of non-planar waveguide fin structures.
1 more element
A method comprising:
- forming a plurality of non-planar fin structures from semiconductor on insulator material;
- depositing carbon based material on the non-planar fin structures;
- annealing the carbon based material to thermally decompose the carbon based material into a non-planar sheet of stressed graphene material extending over an entirety of each of the plurality of non-planar fin structures;
- and
- forming contacts in electrical connection to the non-planar sheet of graphene material.
2 more elements
Dependencies are inferred from the claim text.