Semiconductor device

A semiconductor device comprising a main cell region and a sense cell region each including a semiconductor switching element, and configured to detect a current flowing through the semiconductor switching element in the main cell region by the semiconductor switching element in the sense cell region, the semiconductor switching element including:

• a drift layer of a first conductivity type;
• a channel layer of a second conductivity type disposed on the drift layer;
• a first impurity region of a first conductivity type disposed in a surface layer portion of the channel layer and having an impurity concentration higher than an impurity concentration of the drift layer;
• a trench gate structure in which a shield electrode and a gate electrode layer are stacked as a two-layer structure through a gate insulating film within a trench that reaches the drift layer from the first impurity region through the channel layer and extends in one direction as a longitudinal direction;
• a second impurity region of the first or second conductivity type disposed on an opposite side to the channel layer across the drift layer and has an impurity concentration higher than the impurity concentration of the drift layer;
• an upper electrode electrically connected to the first impurity region and the channel layer and electrically connected to the shield electrode;
• a gate liner electrically connected to the gate electrode layer;
• and
• a lower electrode electrically connected to the second impurity region, wherein
• the trench is continuously connected to reach the main cell region and the sense cell region, and the shield electrode and the gate electrode layer are continuously connected to reach the main cell region and the sense cell region within the trench,
• the shield electrode extends to a side of the main cell region away from the sense cell region on one end side of the trench in the longitudinal direction to be electrically connected to the upper electrode, and
• the gate electrode layer extends to a side of the main cell region away from the sense cell region on the other end side of the trench in the longitudinal direction to be electrically connected to the gate liner.