Semiconductor memory device
AssigneeToshiba Memory Corporation
InventorsYosuke MURAKAMI, Yusuke ARAYASHIKI, Kazuhiko YAMAMOTO
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Abstract
According to one embodiment, a semiconductor memory device includes a substrate, a first signal line, a first conductive layer, a first storage layer and a first insulation layer. The first signal line extends in a first direction crossing the substrate. The first conductive layer extends in a second direction crossing the first direction and being parallel to the substrate, and has a first surface and a second surface that is away from the first signal line in a third direction crossing the first and second directions. The first storage layer is provided between the first signal line and the first conductive layer. The first insulation layer is provided between the second surface and the first storage layer.
Claims20
A semiconductor memory device comprising:
- a substrate;
- a first signal line that extends in a first direction crossing the substrate;
- a first conductive layer that extends in a second direction crossing the first direction and being parallel to the substrate, and has a first surface and a second surface that is away from the first signal line in a third direction crossing the first and second directions;
- a first storage layer provided between the first signal line and the first conductive layer;
- and
- a first insulation layer provided between the second surface and the first storage layer.
A semiconductor memory device comprising:
- a substrate;
- a first conductive layer that extends in a first direction crossing the substrate;
- a second conductive layer that extends in a second direction crossing the first direction and being parallel with the substrate, and has a first surface and a second surface that is away from the first conductive layer in a third direction crossing the first and second directions;
- a first resistance change layer provided between the first conductive layer and the first surface;
- and
- a first insulation layer provided between the second surface and the first conductive layer.
Dependencies are inferred from the claim text.