Imaging panel and method for producing same

A method for producing an imaging panel that generates an image based on scintillation light that is obtained from X-rays transmitted through an object, the producing method comprising the steps of:

• forming a thin film transistor on a substrate;
• forming a first insulating film and a second insulating film on the thin film transistor;
• forming a first contact hole on a drain electrode of the thin film transistor, the first contact hole passing through the first insulating film and the second insulating film;
• forming a lower electrode on the second insulating film, the lower electrode being connected with the drain electrode through the first contact hole;
• forming a protection film that covers a side end portion of the lower electrode;
• forming a first semiconductor layer of a first conductive type, an intrinsic amorphous semiconductor layer, and a second semiconductor layer of a second conductive type that is opposite to the first conductive type, in the stated order, as a photoelectric conversion layer, so that the photoelectric conversion layer covers the lower electrode and the protection film;
• forming an upper electrode on the second semiconductor layer;
• applying a resist on the second semiconductor layer so that the resist covers the upper electrode, and etching the first semiconductor layer, the intrinsic amorphous semiconductor layer, and the second semiconductor layer, thereby forming the photoelectric conversion layer;
• and
• carrying out a cleaning treatment with use of hydrogen fluoride with respect to a surface of the photoelectric conversion layer formed.