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US 2019/0296069 A1Published application
Image sensor including a phase difference detection pixel having a lining layer
AssigneeSK hynix Inc.
InventorYun-Hui Yang
Life of this patent
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Abstract
An image sensor may include an antireflection layer formed over a substrate, grid patterns and a guide pattern that are disposed over the antireflection layer, a color filter between the grid patterns, a phase difference detection filter structured to include a portion between one of the grid patterns and the guide pattern, and a lining layer formed to include a portion between one of the grid patterns and the phase difference detection filter. The lining layer has a refractive index lower than that of the phase difference detection filter.
Claims20
An image sensor comprising:
- a substrate;
- an image photo sensor formed in the substrate to receive incident light and to produce an image signal representing a received portion of the incident light for forming an image;
- a phase difference detection photo sensor formed in the substrate to receive a portion of the incident light to convert the received light into a phase difference detection signal representing a phase of the image;
- an antireflection layer formed over the substrate to reduce optical reflection of the incident light received by the image photo sensor and the phase difference detection photo sensor;
- a grid pattern and a guide pattern formed over the antireflection layer;
- a color filter formed over the antireflection layer and the image photo sensor to transmit light in the incident light at a selected color to reach the image photo sensor for producing the image signal;
- a phase difference detection filter formed over the antireflection layer and the phase difference detection photo sensor to transmit light in the incident light at a selected color to reach the phase difference detection photo sensor for producing the phase difference detection signal;
- and
- a lining layer formed of a transparent layer having a refractive index lower than a refractive index of the phase difference detection filter and located to transmit light filtered by the phase difference detection filter, the lining layer structured to include a portion located between the color filter and the phase difference detection filter.
6 more elements
An image sensor comprising:
- an antireflection layer formed over a substrate;
- grid patterns and a guide pattern that are disposed over the antireflection layer;
- a color filter between the grid patterns;
- a phase difference detection filter structured to include a portion between one of the grid patterns and the guide pattern;
- and
- a lining layer formed to include a portion between one of the grid patterns and the phase difference detection filter,
- wherein the lining layer has a refractive index lower than that of the phase difference detection filter.
4 more elements
An image sensor comprising:
- a substrate including an image photodiode to receive incident light and to produce an image signal representing a received portion of the incident light for forming an image and a phase difference detection photodiode to receive a portion of the incident light to convert the received light into a phase difference detection signal representing a phase of the image;
- an antireflection layer disposed over the substrate;
- a color filter disposed over the antireflection layer and overlapping with the image photodiode to filter light that is incident to the image photodiode;
- a phase difference detection filter disposed over the antireflection layer and overlapping with the phase difference detection photodiode to filter light that is incident to the phase difference detection photodiode to filter light that is incident to the image;
- and
- a lining layer formed in contact with the phase difference detection filter to include a portion between the color filter and the phase difference detection filter,
- wherein the lining layer has a refractive index lower than a refractive index of the phase difference detection filter and a refractive index of the color filter.
4 more elements
Dependencies are inferred from the claim text.