Quality control method of position measurement light source, semiconductor manufacturing apparatus, and method for manufacturing semiconductor device
AssigneeToshiba Memory Corporation
InventorsMiki Toshima, Sadatoshi Murakami
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Abstract
According to one embodiment, a quality control method of a position measurement light source includes irradiating light of the position measurement light source on a plurality of marks having different heights and measuring a relationship between the height of the mark and an intensity of light reflected by the mark. The quality control method includes identifying a wavelength of the position measurement light source by comparing measurement data acquired by the measuring to reference data of a relationship between the height of the mark and an intensity of reflected light for each of a plurality of wavelengths.
Claims20
A quality control method of a position measurement light source, comprising:
- irradiating light of the position measurement light source on a plurality of marks having different heights and measuring a relationship between the height of the mark and an intensity of light reflected by the mark;
- and
- identifying a wavelength of the position measurement light source by comparing measurement data acquired by the measuring to reference data of a relationship between the height of the mark and an intensity of reflected light for each of a plurality of wavelengths.
A semiconductor manufacturing apparatus, comprising:
- a position measurement light source;
- and
- a controller irradiating light of the position measurement light source on a plurality of marks having different heights, measuring a relationship between the height of the mark and an intensity of light reflected by the mark, and identifying a wavelength of the position measurement light source by comparing measurement data acquired by the measuring to reference data of a relationship between the height of the mark and an intensity of reflected light for each of a plurality of wavelengths.
Dependencies are inferred from the claim text.