Semiconductor device and method of manufacturing the same
AssigneeSK hynix Inc.
InventorNam Jae LEE
Life of this patent
Estimating the term…
Abstract
A semiconductor device may comprise a plurality of conductive lines and a plurality of contact plugs. The plurality of conductive lines may include a first conductive line a second conductive line. The plurality of contact plugs may include a first contact plug and a second contact plug. The first contact plug may have a first pillar portion and a first protruding portion protruding from a sidewall of the first pillar portion at a first depth, so as to be in alignment and contact with a sidewall of the first conductive line. The second contact plug may have a second pillar portion and a second protruding portion protruding from a sidewall of the second pillar portion at a second depth, so as to be in alignment and contact with a sidewall of the second conductive line.
Claims7
A semiconductor device, comprising:
- interlayer insulating layers stacked in a first direction and separated from each other;
- conductive patterns formed between the interlayer insulating layers, wherein edges of the conductive patterns are aligned in the first direction;
- and
- contact plugs contacting the edges of the conductive patterns.
Dependencies are inferred from the claim text.