Sample Transport Device With Integrated Metrology

A metrology system comprising:

• one or more casings configured to be positioned within an interior cavity of a sample transport device;
• an illumination source within one of the one or more casings;
• one or more illumination optics within one of the one or more casings, the one or more illuminating optics further configured to direct illumination from the illumination source to a sample located in the interior cavity of the sample transport device;
• one or more collection optics within one of the one or more casings, the one or more collection optics further configured to collect light from the sample in response to the illumination from the illumination source;
• and
• one or more detectors within one of the one or more casings, the one or more detectors configured to generate metrology data based on at least a portion of the light collected by the one or more collection optics.