Ambient controlled transfer module and process system

A substrate transfer apparatus, comprising:

• a transfer chamber for generating a substantially inert environment at about atmospheric pressure and devoid of oxidants, the transfer chamber further comprising:
• a chamber body defining a transfer volume;
• an optically transparent lid coupled to the chamber body;
• a robot disposed in the transfer volume;
• a plurality of local center finding sensors optically coupled with one or more apertures in the transfer chamber;
• a plurality of purge gas ports disposed in the chamber body;
• a plurality of diffusers extending from the purge gas ports;
• an exhaust port disposed in the chamber body opposite the plurality of purge gas ports;
• an exhaust conduit coupled to the chamber body and extending from the exhaust port;
• and
• an oxygen sensor in fluid communication with the transfer volume via the exhaust conduit and the exhaust port.

A substrate transfer apparatus, comprising:

• a load lock chamber for generating a substantially inert environment at about atmospheric pressure, the load lock chamber comprising:
• a chamber body defining a process volume;
• a pedestal disposed in the process volume;
• a lid coupled to the chamber body opposite the pedestal;
• a purge gas port disposed through the lid;
• and
• an exhaust port disposed in the chamber body adjacent to the pedestal and opposite the purge gas port;
• and
• a transfer chamber for generating a substantially inert environment at about atmospheric pressure coupled to the load lock chamber, the transfer chamber comprising:
• a chamber body defining a transfer volume;
• a robot disposed in the transfer volume;
• a plurality of local center finding sensors coupled to the chamber body;
• a plurality of purge gas ports disposed in the chamber body;
• and
• an exhaust conduit coupled to the chamber body and extending from an exhaust port of the transfer chamber.