Cutting apparatus
AssigneeDisco Corporation
InventorsHisashi ARAKIDA, Hiroyuki HIRAGA
Life of this patent
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Abstract
A cutting apparatus includes a cutting unit that cuts a workpiece included in a frame unit, an ultraviolet ray irradiation unit that irradiates the frame unit with ultraviolet rays, and a control unit. The control unit includes a processing mode registration section in which commands to be output to components. The processing mode registration section registers therein a command in a cutting apparatus mode that causes the cutting unit to cut the workpiece and a command in an ultraviolet ray irradiation apparatus mode that causes the ultraviolet ray irradiation unit to irradiate the frame unit with ultraviolet rays.
Claims2
A cutting apparatus, comprising:
- a chuck table that holds a frame unit, the frame unit including an annular frame, an adhesive tape affixed to the annular frame and having adhesion reduced by being irradiated with ultraviolet rays, and a workpiece to which the adhesive tape is affixed;
- a cutting unit that cuts with a cutting blade the workpiece included in the frame unit held by the chuck table;
- a cleaning unit that cleans the frame unit including the workpiece cut by the cutting unit;
- an ultraviolet ray irradiation unit that irradiates the adhesive tape of the frame unit with ultraviolet rays;
- a cassette placement unit in which a cassette capable of housing the frame unit is placed;
- a conveyance unit that conveys the frame unit to and from the cassette placed on the cassette placement unit, the chuck table, the cleaning unit, and the ultraviolet ray irradiation unit;
- and
- a control unit that controls components including the cutting unit, the cleaning unit, the ultraviolet ray irradiation unit, and the conveyance unit, wherein
- the control unit includes a processing mode registration section in which a command to be output by the control unit to each of the components in each of a plurality of types of processing that can be performed for the frame unit is registered,
- the processing mode registration section registers therein:
- a command in a cutting apparatus mode that causes the cutting unit to cut the workpiece included in the frame unit unloaded from the cassette and held by the chuck table and causes the conveyance unit to convey and load the frame unit including the cut workpiece onto the cassette, and
- a command in an ultraviolet ray irradiation apparatus mode that causes the ultraviolet ray irradiation unit to irradiate the frame unit unloaded from the cassette with ultraviolet rays, without causing the cutting unit to cut the workpiece included in the frame unit, and that causes the conveyance unit to convey and load onto the cassette the frame unit that has been irradiated with the ultraviolet rays, and
- the control unit has a function that acquires from the processing mode registration section a command corresponding to the processing to be performed for the frame unit and that outputs the command to the corresponding component.
Dependencies are inferred from the claim text.