Charged particle beam deflection device
AssigneeKabushiki Kaisha Toshiba
InventorHideto Furuyama
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Abstract
According to one embodiment, a charged particle beam deflection device includes a substrate, a plurality of charged particle beam transmission apertures provided in the substrate, a plurality of electrode pairs deflecting charged particle beams passing through the charged particle beam transmission apertures, a light receiving element controlling a voltage applied to one electrode of the electrode pair, and an optical waveguide providing an optical signal to the light receiving element. A distance between the charged particle beam transmission aperture and the light receiving element is shorter than a distance between mutually-adjacent charged particle beam transmission apertures.
Claims14
A charged particle beam deflection device, comprising:
- a substrate;
- a plurality of charged particle beam transmission apertures provided in the substrate;
- a plurality of electrode pairs deflecting charged particle beams passing through the charged particle beam transmission apertures;
- a light receiving element controlling a voltage applied to one electrode of the electrode pair, a distance between one of the charged particle beam transmission apertures and the light receiving element being shorter than a distance between mutually-adjacent charged particle beam transmission apertures;
- and
- an optical waveguide providing an optical signal to the light receiving element.
A charged particle beam deflection device, comprising:
- a substrate;
- a plurality of charged particle beam transmission apertures two-dimensionally arranged in the substrate;
- an electrode pair deflecting a charged particle beam passing through one of the charged particle beam transmission apertures;
- two light receiving elements controlling a voltage applied to one electrode of the electrode pair;
- two optical waveguides independently providing optical signals respectively to the two light receiving elements;
- and
- two light-emitting elements or two optical couplers independently introducing the optical signals respectively to the two optical waveguides.
A charged particle beam deflection device, comprising:
- a substrate;
- one or a plurality of charged particle beam transmission apertures provided in the substrate;
- an electrode pair deflecting a charged particle beam passing through the charged particle beam transmission aperture;
- two light receiving elements;
- two optical waveguides independently providing optical signals respectively to the two light receiving elements;
- and
- two light-emitting elements or two optical couplers independently introducing the optical signals respectively to the two optical waveguides,
- a cathode of a first light receiving element of the two light receiving elements being set to a high potential,
- an anode of a second light receiving element of the two light receiving elements being set to a low potential,
- an anode of the first light receiving element being connected to a cathode of the second light receiving element and one electrode of the electrode pair.
Dependencies are inferred from the claim text.