Magnetic lens and exciting current control method
AssigneeFocus-Ebeam Technology (Beijing) Co., Ltd.
InventorsWei He, Shuai Li
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Abstract
A magnetic lens is disclosed, which includes: a magnetic yoke, an exciting coil and a power supply controlling system. The magnetic yoke is at outside of the exciting coil and surrounds the coil; the exciting coil is made up of litz wires; the power supply controlling system is arranged to supply power to the exciting coil and control the flow directions and magnitudes of the currents in the exciting coil. A method for controlling the magnetic lens is also disclosed.
Claims8
A magnetic lens, comprising:
- a magnetic yoke, an exciting coil, and a power supply controlling system;
- wherein,
- the magnetic yoke is at outside of the exciting coil and surrounds the exciting coil;
- the exciting coil is made up of litz wires;
- and
- the power supply controlling system is arranged to supply power to the exciting coil and control flow directions and magnitudes of currents of the exciting coil.
A method for controlling a magnetic lens, wherein the magnetic lens has an exciting coil made up of litz wires, the method comprising:
- supplying power to the exciting coil by a power supply controlling system in the magnetic lens, and
- controlling flow directions and magnitudes of currents in the exciting coil, to vary a magnetic field intensity of the magnetic lens and keep a thermal dissipation power unchanged.
Dependencies are inferred from the claim text.