Electron beam device
AssigneeHitachi, Ltd.
InventorsYasunari SOHDA, Daisuke BIZEN, Makoto SAKAKIBARA
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Abstract
The present invention provides an electron beam device suitable for observing the bottom of a deep groove or a deep hole with a high degree of accuracy under a large current condition. The electron beam device has: an electron optical system having an irradiation optical system to irradiate an aperture 153 with an electron beam 116 emitted from an electron source 100 and a reduction projection optical system to project and form an aperture image of the aperture on a sample 114; and a control unit 146 to control a projection magnification of the aperture image of the aperture projected and formed on the sample and an aperture angle 402 of the electron beam emitted to the sample by the electron optical system.
Claims9
An electron beam device having:
- an electron optical system having an irradiation optical system to irradiate an aperture with an electron beam emitted from an electron source and a reduction projection optical system to project and form an aperture image of the aperture on a sample;
- and
- a control unit to control a projection magnification of the aperture image of the aperture projected and formed on the sample and an aperture angle of the electron beam emitted to the sample by the electron optical system.
Dependencies are inferred from the claim text.