Ion Beam Device
AssigneeHitachi High-Technologies Corporation
InventorsHiroyasu SHICHI, Shinichi MATSUBARA, Yoshimi KAWANAMI, Hiroyuki MUTO
Life of this patent
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Abstract
In order to provide an ion beam apparatus excellent in safety and stability even when a sample is irradiated with hydrogen ions, the ion beam apparatus includes a vacuum chamber, a gas field ion source that is installed in the vacuum chamber and has an emitter tip, and gas supply means for supplying a gas to the emitter tip. The gas supply means includes a mixed gas chamber that is filled with a hydrogen gas and a gas for diluting the hydrogen gas below an explosive lower limit.
Claims9
An ion beam apparatus comprising:
- a vacuum chamber;
- a gas field ion source that is installed in the vacuum chamber and has an emitter tip;
- an extraction electrode that is disposed to face the emitter tip;
- a gas supply means for supplying a gas to the emitter tip;
- a focusing lens that focuses an ion beam emitted from the emitter tip;
- a deflector that deflects the ion beam that has passed through the focusing lens;
- and
- a secondary particle detector that irradiates a sample with the ion beam to detect secondary particles emitted from the sample,
- wherein the gas supply means supplies a hydrogen gas that has passed through a hydrogen selective transmission membrane and a neon gas to the emitter tip at the same time.
An ion beam apparatus comprising:
- a vacuum chamber;
- a gas field ion source that is installed in the vacuum chamber and has an emitter tip;
- an extraction electrode that is disposed to face the emitter tip;
- a gas supply means for supplying a gas to the emitter tip;
- a focusing lens that focuses an ion beam emitted from the emitter tip;
- a deflector that deflects the ion beam that has passed through the focusing lens;
- and
- a secondary particle detector that irradiates a sample with the ion beam to detect secondary particles emitted from the sample,
- wherein the gas supply means supplies a hydrogen gas that has passed through a hydrogen selective transmission membrane and nitrogen gas at the same time to the emitter tip.
An ion beam apparatus comprising:
- a vacuum chamber;
- a gas field ion source that is installed in the vacuum chamber and has an emitter tip;
- an extraction electrode that is disposed to face the emitter tip;
- a gas supply means for supplying a gas to the emitter tip;
- a focusing lens that focuses an ion beam emitted from the emitter tip;
- a deflector that deflects the ion beam that has passed through the focusing lens;
- and
- a secondary particle detector that irradiates a sample with the ion beam to detect secondary particles emitted from the sample,
- wherein the gas supply means supplies a hydrogen gas, and a neon gas or a nitrogen gas, to the emitter tip, and the vacuum chamber in which the emitter tip is installed has at least two kinds of non-evaporable getter pumps using different kinds of non-evaporable getter materials.
Dependencies are inferred from the claim text.