Magnetic property measuring systems, methods for measuring magnetic properties, and methods for manufacturing magnetic memory devices using the same
AssigneesSamsung Electronics Co., Ltd., MicroSense, LLC
InventorsEunsun NOH, Juhyun KIM, Ung Hwan Pl, Ferenc Z VAJDA, Rachid MAFHOUM
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Abstract
A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.
Claims20
A magnetic property measuring system, comprising:
- a plurality of coil structures configured to apply a magnetic field to a sample, the magnetic field perpendicular to a surface of the sample, each coil structure of the plurality of coil structures including
- a pole piece, and
- a coil surrounding an outer circumferential surface of the pole piece;
- a light source configured to irradiate incident light to the sample, the incident light having a wavelength equal to or less than about 580 nm;
- and
- a detector configured to detect a polarization of light reflected from the sample based on the incident light irradiated to the sample.
A method for measuring magnetic properties, the method comprising:
- preparing a sample, the sample including
- a substrate,
- a wiring structure on the substrate, and
- a plurality of magnetic tunnel junction patterns on the wiring structure and laterally spaced apart from each other;
- applying a magnetic field to the sample, the magnetic field perpendicular to a top surface of the substrate;
- irradiating incident light onto the sample, the incident light having a wavelength equal to or less than about 580 nm;
- detecting a polarization of light reflected from the sample based on the incident light being irradiated onto the sample;
- and
- determining one or more perpendicular magnetic properties of the plurality of magnetic tunnel junction patterns based on analyzing the detected polarization of the reflected light.
A method for manufacturing a magnetic memory device, the method comprising:
- forming a magnetic tunnel junction layer on a substrate;
- patterning the magnetic tunnel junction layer to form a plurality of magnetic tunnel junction patterns;
- measuring one or more perpendicular magnetic properties of the plurality of magnetic tunnel junction patterns subsequent to the patterning of the magnetic tunnel junction layer;
- and
- determining whether the measured one or more perpendicular magnetic properties are in an allowable range,
- wherein the measuring of the one or more perpendicular magnetic properties of the plurality of magnetic tunnel junction patterns includes
- applying a magnetic field to the substrate, the magnetic field perpendicular to a top surface of the substrate;
- irradiating incident light onto the substrate, the incident light having a wavelength equal to or less than about 580 nm;
- and
- detecting a polarization of light reflected from the substrate based on the incident light being irradiated onto the substrate.
Dependencies are inferred from the claim text.