Quality monitoring system
AssigneeKabushiki Kaisha Toshiba
InventorsRisa SAKAI, Wataru YAMADA
Life of this patent
Estimating the term…
Abstract
A quality monitoring system according to an embodiment includes an imager, an inspector, and a processor. The imager repeatedly acquires a first image of an equipment. The equipment repeats a first operation processing a workpiece. The first image is of the equipment imaged at a first timing of the first operation. The inspector inspects a quality of the workpiece after processing. The processor decides, based on a plurality of the first images, an evaluation of the equipment imaged in each of the first images. The processor analyzes a correlation between a plurality of the evaluations and a plurality of the qualities.
Claims5
A quality monitoring system, comprising:
- an imager repeatedly acquiring a first image of an equipment, the equipment repeating a first operation processing a workpiece, the first image being of the equipment imaged at a first timing of the first operation;
- an inspector inspecting a quality of the workpiece after processing;
- and
- a processor deciding, based on a plurality of the first images, an evaluation of the equipment imaged in each of the first images, the processor analyzing a correlation between a plurality of the evaluations and a plurality of the qualities.
A quality monitoring system, comprising:
- an imager repeatedly acquiring a first image of an equipment, the equipment repeating a first operation processing a workpiece, the first image being of the equipment imaged at a first timing of the first operation;
- an inspector inspecting a quality of the workpiece after processing;
- and
- a processor
- determining an abnormality of the equipment imaged in a new first image when the new first image is acquired, the determining being based on a plurality of previous first images,
- deciding an evaluation of the equipment imaged in each of the first images when there is an abnormality of the equipment imaged in the new first image, the deciding being based on the new first image and the previous first images, and analyzing a correlation between a plurality of the evaluations and multiple the a plurality of the qualities.
Dependencies are inferred from the claim text.