Data correction method, computer program for causing computer to perform data correction method, image processor, and scanning probe microscope

Abstract

A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.

Dependencies are inferred from the claim text.