A method of determining a height profile, a measurement system and a computer readable medium

A measurement system configured to determine a height profile of one or more substrates, the measurement system comprising

• a first sensor arrangement configured to measure a first height profile of one or more fields on a substrate, the first height profile being a sum of a first interfield part and a first intrafield part;
• and
• a second sensor arrangement configured to measure a second height profile of one or more further fields on the substrate or on a further substrate, the second height profile being a sum of a second interfield part and a second intrafield part;
• the measurement system further being configured
• to determine from measurements with the first sensor arrangement an average first intrafield part of at least one field of the one or more fields of which the first height profile is measured;
• and
• to determine the height profile of the further fields from the second interfield part and the average first intrafield part.

A measurement system configured to determine a height profile of a substrate, the measurement system being configured to:

• measure a first height profile of one or more fields on a substrate using a first sensor arrangement, the first height profile being a sum of a first interfield part and a first intrafield part;
• measure a second height profile of one or more further fields on the substrate or on a further substrate using a second sensor arrangement, the second height profile being a sum of a second interfield part and a second intrafield part,
• determine, from the measurements with the first sensor arrangement, an average first intrafield part of at least one field of the one or more fields of which the first height profile is measured;
• and
• determine a height profile of the further fields from the second interfield part and the average first intrafield part.

A computer readable medium for storing computer readable code, wherein the code, when executed, causes a measurement system to:

• measure a first height profile of one or more fields on a substrate using a first sensor arrangement, the first height profile being the a sum of a first interfield part and a first intrafield part;
• measure a second height profile of one or more further fields on the substrate or on a further substrate using a second sensor arrangement, the second height profile being a sum of a second interfield part and a second intrafield part,
• determine, from the measurements with the first sensor arrangement, an average first intrafield part of at least one field of the one or more fields of which the first height profile is measured;
• and
• determine a height profile of the further fields from the second interfield part and the average first intrafield part.