Method of metrology and associated apparatuses
AssigneeASML Netherlands B.V.
InventorsThomas Jarik Huisman, Ruben Cornelis Maas, Hermanus Adrianus Dillen
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Abstract
Disclosed is a method of, and associated apparatus for, determining an edge position relating to an edge of a feature comprised within an image, such as a scanning electron microscope image, which comprises noise. The method comprises determining a reference signal from said image; and determining said edge position with respect to said reference signal. The reference signal may be determined from the image by applying a 1-dimensional low-pass filter to the image in a direction parallel to an initial contour estimating the edge position.
Claims20
A method of determining an edge position relating to an edge of a feature comprised within an image that comprises noise, the method comprising:
- determining a reference signal from the image;
- and
- determining the edge position with respect to the reference signal.
A scanning electron microscopy inspection apparatus being operable to image a feature on a substrate, the apparatus comprising:
- a memory storing a set of instructions;
- and
- one or more processors configured to execute the set of instructions to cause the apparatus to perform:
- determining a reference signal from the image;
- and
- determining the edge position with respect to the reference signal.
A non-transitory computer readable medium storing a set of instructions that are executable by one or more processors of an apparatus to cause the apparatus to perform a method for determining an edge position relating to an edge of a feature comprised within an image that comprises noise, the method comprising:
- determining a reference signal from the image;
- and
- determining the edge position with respect to the reference signal.
Dependencies are inferred from the claim text.