Positive photosensitive composition, pattern using same, and method of manufacturing pattern

A positive photosensitive composition comprising:

• a sulfonic acid derivative compound (A) represented by the following Formula (I):
• where X1 represents a linear or branched alkyl group having 1 to 14 carbon atoms;
• a methylene group in the alkyl group is optionally substituted with —S—, —O—, —SO— or —SO2—;
• R1 represents an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, an acyl group-substituted aryl group having 7 to 20 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, a 10-camphoryl group, or a group represented by the following Formula (II):
• where Y1 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms;
• R2 and R3 each independently represent an alkanediyl group having 2 to 6 carbon atoms, a halogenated alkanediyl group having 1 to 6 carbon atoms, an arylene group having 6 to 20 carbon atoms, or a halogenated arylene group having 6 to 20 carbon atoms;
• R4 represents a linear or branched alkyl group having 1 to 18 carbon atoms, a linear or branched halogenated alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aryl group having 6 to 20 carbon atoms, a halogenated aryl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms, or a halogenated arylalkyl group having 7 to 20 carbon atoms;
• a and b each represent 0 or 1;
• either a or b is 1;
• and a symbol “*” means that this group is bound with an adjacent group at the site “*”;
• and
• the aliphatic hydrocarbon group having 1 to 18 carbon atoms, the aryl group having 6 to 20 carbon atoms, the arylalkyl group having 7 to 20 carbon atoms or the alicyclic hydrocarbon group having 3 to 12 carbon atoms has no substituent, or is optionally substituted with a halogen atom or a group selected from a halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 18 carbon atoms and an alkylthio group having 1 to 18 carbon atoms;
• and
• a polymer compound (B) required to contain a structural unit represented by the following Formula (III):
• where R5 represents a hydrogen atom or a methyl group;
• R6 represents an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxycarbonyl group having 2 to 4 carbon atoms;
• f represents a number of 0 to 4;
• and symbols “*” mean that this group is bound with adjacent groups at the sites “*”.