Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator

A photoacid generator generating a sulfonic acid upon irradiation with actinic rays or radiation, represented by any one of General Formula (a), (b), and (I) to (V);

• in General Formula (a), Rf1 represents a fluorine atom or an alkyl group containing a fluorine atom, and R1 represents a monovalent organic group,
• in General Formula (b), Rf2 and Rf3 each independently represent a fluorine atom or an alkyl group containing a fluorine atom, and R2 represents a monovalent organic group,
• in General Formula (I), R11 and R12 each independently represent a monovalent organic group, R13 represents a hydrogen atom or a monovalent organic group, L1 represents a group represented by —CO—O—, —CO—, —O—, —S—, —O—CO—, —S—CO—, or —CO—S—, and two of R11, R12 and R13 may be bonded to each other to form a ring,
• in General Formula (II), R21 and R22 each independently represent a monovalent organic group, R23 represents a hydrogen atom or a monovalent organic group, L2 represents a group represented by —CO—, —O—, —S—, —O—CO—, —S—CO—, or —CO—S—, and two of R21, R22, and R23 may be bonded to each other to form a ring,
• in General Formula (III), R31 and R33 each independently represent a hydrogen atom or a monovalent organic group, and R31 and R33 may be bonded to each other to form a ring,
• in General Formula (IV), R41 and R43 each independently represent a hydrogen atom or a monovalent organic group, and R41 and R43 may be bonded to each other to form a ring, and
• in General Formula (V), R51, R52, and R53 each independently represent a hydrogen atom or a monovalent organic group, and two of R51, R52, and R53 may be bonded to each other to form a ring.