Polarized light radiation device and polarized light radiation method
AssigneeV Technology Co., Ltd.
InventorsToshinari ARAI, Takuro TAKESHITA
Life of this patent
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Abstract
Polarized light emitted from a light source and transmitted through a light transmission region formed in a mask is radiated onto an exposure target object placed on a stage. The polarized light is radiated onto the exposure target object from a direction inclined by approximately 50° to approximately 70° in relation to a direction that is substantially orthogonal to a top surface of the stage.
Claims4
A polarized light radiation device comprising:
- a light source that emits polarized light;
- a mask having a light transmission region formed therein, the light transmission region allowing polarized light having been emitted from the light source to pass therethrough;
- and
- a stage on which an exposure target object to be irradiated with polarized light having passed through the light transmission region is placed,
- wherein the light source radiates polarized light onto the exposure target object from a direction inclined by approximately 50° to approximately 70° in relation to a direction that is substantially orthogonal to a top surface of the stage.
A polarized light radiation method comprising the step of emitting light from a direction inclined by approximately 50° to approximately 70° in relation to a direction that is substantially orthogonal to a top surface of a stage on which an exposure target object is placed, the light being emitted while the stage being transported in a transport direction.
A polarized light radiation method comprising the steps of:
- transporting, in a transport direction, a stage on which an exposure target object is placed;
- with the stage having been transported to a first position, emitting light from a direction inclined by approximately 50° to approximately 70° in relation to a direction that is substantially orthogonal to a top surface of the stage and radiating the light onto a first region of the exposure target object while the stage is being transported in the transport direction;
- transporting the stage in the transport direction to a second position;
- with the stage having been transported to the second position, rotating the stage by approximately 180°;
- transporting the stage in the transport direction to a third position;
- and
- with the stage having been transported to the third position, emitting light from a direction inclined by approximately 50° to approximately 70° in relation to a direction that is substantially orthogonal to the top surface of the stage and radiating the light onto a second region of the exposure target object while the stage is being transported in the transport direction, the second region being different from the first region of the exposure target object.
Dependencies are inferred from the claim text.