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US 2019/0293682 A1Published application
Large Radius Probe
AssigneeBruker Nano, Inc.
InventorJeffrey Wong
Life of this patent
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Abstract
A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.
Claims20
A method of batch-fabricating probes for a surface analysis instrument, the method including:
- providing a substrate;
- forming an array of posts from the substrate;
- depositing tip material on the posts so as to create a hemispherical cap on each post;
- removing the tip material around the cap;
- and
- forming a cantilever for each cap.
3 more elements
A large radius AFM probe microfabricated by a process comprising the steps of:
- providing a substrate;
- forming an array of posts from the substrate;
- depositing tip material on the posts so as to create a hemispherical cap on each post;
- removing the tip material around the cap;
- and
- forming a cantilever for each cap.
3 more elements
Dependencies are inferred from the claim text.