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US 2019/0293596 A1Published application
Gas sensing method, gas sensor, and gas sensing system
AssigneeKabushiki Kaisha Toshiba
InventorsHiroko NAKAMURA, Hideyuki NISHIZAWA, Kenji NAKAMURA
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Abstract
The gas sensing method of an embodiment includes: a step of supplying measured gas to a capacitor including a first electrode, a dielectric formed to be electrically connected to the first electrode, a graphene formed on the dielectric, and a second electrode formed to be electrically connected to the graphene; and a step of measuring a capacitance of the capacitor after the measured gas is brought into contact with the graphene.
Claims16
A gas sensing method, comprising:
- supplying measured gas to a capacitor including a first electrode, a dielectric formed to be electrically connected to the first electrode, a graphene formed on the dielectric, and a second electrode formed to be electrically connected to the graphene;
- and
- measuring a capacitance of the capacitor after the measured gas is brought into contact with the graphene.
A gas sensor, comprising:
- a capacitor which includes:
- a first electrode;
- a dielectric electrically connected to the first electrode;
- a graphene formed on the dielectric;
- and a second electrode electrically connected to the graphene;
- a power supply to apply a voltage between the first electrode and the second electrode;
- and
- an ammeter to measure a current between the first electrode and the second electrode.
5 more elements
Dependencies are inferred from the claim text.