Semiconductor measurement device and method of measuring semiconductor

A method of measuring a semiconductor using a semiconductor measurement device, the device including a probe that is contactable with a semiconductor sample, a driver configured to move a contact position of the probe with respect to the semiconductor sample, a power supply configured to apply electric power between the probe and the electrode provided in the semiconductor sample, a measurement operation portion configured to measure a current flowing via the semiconductor sample, and a display configured to display a measurement result of the current, the method comprising:

• measuring a current flowing via the semiconductor sample between the probe and the electrode when a voltage applied between the probe and the electrode is changed, the current flowing measured for each of plural measurement points of a surface of the semiconductor sample while causing the probe to scan the measurement points, or while sequentially bringing the probe into contact with the measurement points;
• and
• displaying a relationship between the voltage and the current measured at each of the measurement points.