Foreign substance inspection apparatus, processing apparatus, and method of manufacturing article

Abstract

A foreign substance inspection apparatus performs foreign substance detection processing of detecting a foreign substance present on a surface of a substrate. The apparatus includes a detector that includes a projector configured to project light onto the surface and an optical receiver configured to receive scattered light from the surface, a scanning mechanism configured to scan a position on the surface onto which the light is projected by the projector, and a controller configured to control the foreign substance detection processing so that detection of the foreign substance is performed on a detection region which is a region excluding, from the surface, an exclusion region where a step is present thereon, wherein the controller controls the projection by the projector so that light is not projected to the step.

Dependencies are inferred from the claim text.