Method and device for inspecting spatial light modulator, and exposure method and device

An exposure apparatus for exposing an object, comprising:

• an illumination system which supplies exposure light;
• a spatial light modulator having a base and a plurality of mirrors, each reflecting the exposure light, each of the plurality of mirrors being arranged on the base in parallel with the base;
• a projection optical system which projects a pattern onto the object with the exposure light by way of the spatial light modulator;
• and
• an inspecting system including a light receiver which receives light from the plurality of mirrors of the spatial light modulator by way of the projection optical system and provides an output regarding deforming state of the base.

An exposure method for exposing an object, comprising:

• supplying exposure light;
• providing a spatial light modulator having a base and a plurality of mirrors, each reflecting the exposure light, each of the plurality of mirrors being arranged on the base in parallel with the base;
• projecting a pattern onto the object with the exposure light, using a projection optical system;
• receiving light from the plurality of mirrors of the spatial light modulator by way of the projection optical system;
• and
• providing an output regarding deforming state of the base.