Infrared sensor
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKouhei TAKAHASHI, Takashi KAWASAKI, Yasuyuki NAITO, Morio TOMIYAMA
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Abstract
An infrared sensor is formed in such a manner that an infrared receiver and a base substrate are spaced with a beam made of a thin-film phononic crystal in which through holes are arranged periodically. The beam made of a phononic crystal is formed in such a manner that a period P of through holes increases at arbitrary intervals in a direction from the infrared receiver toward the base substrate.
Claims2
A thin film having a substantially rectangular shape in a plain view, the thin film comprising:
- a first domain;
- a second domain;
- and
- a third domain, wherein:
- the first domain is located between the second domain and one end of a longitudinal direction of the thin film in the plain view,
- the first domain is formed of a phononic crystal comprising through holes arranged regularly at a period p1,
- the second domain is located between the first domain and the third domain in the plain view,
- the second domain is formed of a phononic crystal comprising through holes arranged regularly at a period p2,
- the third domain is located between the second domain and other end of the longitudinal direction of the thin film in the plain view,
- the third domain is formed of a phononic crystal comprising through holes arranged regularly at a period p3,
- a value of the period p2 is greater than a value of the period p1, and
- a value of the period p3 is greater than a value of the period p2.
A method of using a thin film having a substantially rectangular shape in a plain view, the method comprising:
- generating a temperature gradient in the thin film towards one end of a longitudinal direction of the thin film from other end of the longitudinal direction of the thin film, wherein:
- the thin film includes a first domain, a second domain, and third domain, the first domain is located between the second domain and the one end in the plain view,
- the first domain is formed of a phononic crystal comprising through holes arranged regularly at a period p1,
- the second domain is located between the first domain and the third domain in the plain view,
- the second domain is formed of a phononic crystal comprising through holes arranged regularly at a period p2,
- the third domain is located between the second domain and the other end in the plain view,
- the third domain is formed of a phononic crystal comprising through holes arranged regularly at a period p3,
- a value of the period p2 is greater than a value of the period p1, and
- a value of the period p3 is greater than a value of the period p2.
Dependencies are inferred from the claim text.