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US 2019/0293467 A1Published application
Mass air flow sensor with absolute pressure compensation
AssigneeHoneywell International Inc.
InventorsRichard C. Sorenson, Derek Gilles, William Hoover, Jamie Speldrich, Ian Bentley
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Abstract
A mass flow sensor assembly that contains an absolute pressure sensor for compensating via electronics an output reading of mass flow of a fluid through a channel. The flow and pressure sensors may be built in close proximity to each other in the channel. The mass flow sensor assembly incorporating the absolute pressure sensor may be fabricated using MEMS techniques.
Claims20
A flow sensor assembly comprising:
- a housing having a channel;
- an input port connected to a first end of the channel;
- an output port connected to a second end of the channel;
- a mass flow sensor situated in the channel;
- an absolute pressure sensor having a configuration so that the absolute pressure sensor can detect absolute pressure in the cavity;
- and
- an electronics module connected to the absolute pressure sensor and the mass flow sensor;
- and
- wherein:
- mass flow rate signals from the mass flow sensor are sent to the electronics;
- the electronics provides an indication of a mass flow rate of a fluid in the channel according to the flow rate signals;
- absolute pressure signals from the absolute pressure sensor are sent to the electronics;
- and
- the electronics compensates the indication of the mass flow rate according to the absolute pressure signals.
11 more elements
A compensated flow sensor comprising:
- a flow channel having an in port at a first end and an out port at a second end;
- a mass flow sensor situated in the flow channel;
- an absolute pressure sensor situated adjacent to the flow sensor;
- and
- a controller having inputs for connection to outputs of the mass flow sensor and the absolute pressure sensor, and having an output for an indication of a mass flow rate of a fluid in the channel;
- and
- wherein the indication of the mass flow rate is compensated by the controller according to an amount of absolute pressure detected by the absolute pressure sensor.
4 more elements
A method for detecting a fluid flow rate in a channel comprising:
- situating a fluid flow sensor in a channel;
- situating an absolute pressure sensor in the channel;
- processing measurements from the fluid flow sensor and the absolute pressure sensor of a fluid in the channel;
- calculating a flow rate based on processed measurements from the fluid flow sensor;
- and
- compensating the flow rate based on processed measurements from the absolute pressure sensor;
- and
- wherein the fluid flow sensor and the absolute pressure sensor are situated adjacent to each other in the channel.
5 more elements
Dependencies are inferred from the claim text.