Apparatus and method for measuring micrometer scale features of electronic component over millimeter scale distances to nanometer scale precision
AssigneeInternational Business Machines Corporation
InventorRobert G. Biskeborn
Life of this patent
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Abstract
In one general embodiment, an apparatus for moving a sample a precise distance in an imaging device includes a base, and a movable portion positioned above the base and configured to move relative to the base. An extent of motion of the movable portion is constrained by stops. The extent of motion is within 10 nm of a predefined distance of greater than 1 mm. Additional apparatuses and methods are also presented.
Claims20
An apparatus for moving a sample a precise distance in an imaging device, the apparatus comprising:
- a base;
- and
- a movable portion positioned above the base and configured to move relative to the base, an extent of motion of the movable portion being constrained by stops,
- wherein the extent of motion is within 10 nm of a predefined distance of greater than 1 mm.
A method for measuring a distance between features of a sample, the method comprising:
- positioning an apparatus for moving a sample a precise distance on a stage of an imaging device, wherein the apparatus includes a base and a movable portion positioned above the base, the movable portion being configured to move along the base, an extent of motion of the movable portion being constrained by stops, wherein the extent of motion is within 10 nm of a predefined distance of greater than 1 mm;
- positioning the sample on the movable portion of the apparatus;
- generating a first image of a first feature of the sample using the imaging device when the movable portion is abutting a first of the stops;
- moving the movable portion to a second of the stops;
- generating a second image of a second feature of the sample using the imaging device;
- and
- computing a distance between the first feature and the second feature based on the images.
A method for measuring a distance between features of a sample, the method comprising:
- positioning a sample on a movable portion of an apparatus;
- generating a first image of a first feature of the sample using an imaging device when the movable portion is in a first position;
- moving the movable portion to a second position a precise distance from the first position;
- generating a second image of a second feature of the sample using the imaging device when the movable portion is in the second position;
- and
- computing a distance between the first feature and the second feature based on the images.
Dependencies are inferred from the claim text.