Apparatus and method for measuring a three dimensional shape

An apparatus for measuring a three dimensional shape, comprising:

• a projecting unit above an inspection object placed on a table, configured to radiate a first light in a grid pattern to the inspection object, wherein an intensity of the first light in the grid pattern is uniform along a direction of the grid pattern;
• a plurality of imaging units configured to capture grid images generated from the first light reflected off of the inspection object, the plurality of imaging units being arranged in a plurality of different directions to capture the grid images including different sides of the inspection object;
• and
• a control unit configured to operate the plurality of imaging units such that the plurality of imaging units capture the grid images simultaneously and to calculate the three dimensional shape of the inspection object based on the grid images captured by the plurality of imaging units,
• wherein each of the plurality of imaging units is arranged to be oblique to the direction of the grid pattern on a plane of the table in a plan view of the table.

An apparatus for measuring a three dimensional shape, comprising:

• a projecting unit above an inspection object placed on a table, configured to radiate a first light in a grid pattern to the inspection object, wherein an intensity of the first light in the grid pattern is uniform along a direction of the grid pattern;
• a plurality of imaging units configured to capture grid images generated from the first light reflected off of the inspection object, the plurality of imaging units being arranged in a plurality of different directions to capture the grid images including different sides of the inspection object;
• and
• a control unit configured to operate the plurality of imaging units such that the plurality of imaging units capture the grid images simultaneously and to calculate the three dimensional shape of the inspection object based on the grid images captured by the plurality of imaging units,
• wherein each of the plurality of imaging units is arranged to be oblique to the direction of the grid pattern on a plane of the table in a plan view of the table and
• wherein the projecting unit is further configured to radiate the first light to the inspection object perpendicularly to the table.