Optical module for optical height measurement

Abstract

An optical module for optical height measurement optically measures a height of a specimen and includes an irradiation optical system, two detection optical systems, and a light dividing element. The irradiation optical system includes a laser light source and an objective lens to irradiate the specimen with a light beam. The two detection optical systems each include a divided optical detector configured to detect a reflected light reflected by the specimen. The light dividing element is configured to guide the reflected light to the two detection optical systems. A light that has transmitted the light dividing element and a light reflected by the light dividing element are guided to the respective two detection optical systems. Intensity distributions of the transmitted light and the reflected light on the two detection optical systems are inverted in line symmetry.

Dependencies are inferred from the claim text.