Substrate treating apparatus and exhaust method thereof
AssigneeSCREEN Holdings Co., Ltd.
InventorsYasuhiro SHIBA, Bingxi LIU
Life of this patent
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Abstract
Disclosed is a substrate treating apparatus with a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate to form a coat film. The apparatus includes the following elements: a first bake group, a second bake group, a first exhaust pipe that forms a flow path of exhaust gases from the first bake group with its end being in fluid communication with an exhaust gas processor that processes the exhaust gases, a second exhaust pipe that forms a flow path of exhaust gases from the second bake group, and a junction provided at a midstream of the first exhaust pipe and in fluid communication with a downstream side of the second exhaust pipe.
Claims20
A substrate treating apparatus with a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate to form a coat film, the apparatus comprising:
- a first bake group formed by multiplying the baking unit in number to include a plurality of the baking units;
- a second bake group formed by multiplying the baking unit the baking unit in number to include a plurality of the baking units;
- a first exhaust pipe that forms a flow path of exhaust gases from the first bake group with its end being in fluid communication with an exhaust gas processor that processes the exhaust gases;
- a second exhaust pipe that forms a flow path of exhaust gases from the second bake group;
- and
- a junction provided at a midstream of the first exhaust pipe and in fluid communication with a downstream side of the second exhaust pipe.
An exhaust method of a substrate treating apparatus with a baking unit for heating a substrate to which a treating liquid that generates sublimate through heating is applied to bake a surface of the substrate to form a coat film, the method comprising:
- an exhausting step of meeting exhaust gases from a first bake group through a first exhaust pipe with exhaust gases from a second bake group through a second exhaust pipe at a junction formed at a midstream of the first exhaust pipe to discharge the exhaust gases to an exhaust gas processor that possesses the exhaust gases, the first bake group being formed by multiplying the baking unit in number to include a plurality of baking units, the second bake group being formed by multiplying the baking unit in number to include a plurality of baking units.
Dependencies are inferred from the claim text.