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US 2019/0293310 A1Published application
Low humidity generator
OwnerRobert O. Hardyinventor
Life of this patent
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Abstract
The embodied invention is a low humidity generator which encapsulates essential piping, pressure regulator, flow regulator, and saturator in a sealed vacuum chamber. Additionally, Stirling piston type coolers are used to cool the saturator. This eliminates atmospheric water vapor permeation and the need for thermal insulation surrounding the piping and control units. Also, the humidity generator has improved cool down characteristics, improved thermal control, and better maintenance access.
Claims19
A humidity generator for a low dewpoint gas comprising:
- A. a vacuum chamber, wherein:
- i. a saturator,
- ii. a saturator pressure control valve connected to said saturator, and
- iii. an exit flow control valve connected to said saturator, are located within said vacuum chamber,
- B. a vacuum pump connected to said vacuum chamber,
- C. an upper Stirling cooler thermally connected to an upper surface of said saturator, and
- D. a lower Stirling cooler thermally connected to a lower surface of said saturator.
4 more elements
A method of generating a low dewpoint gas in a humidity generator comprising:
- A. providing:
- a. a vacuum chamber, wherein:
- i. a saturator,
- ii. a saturator pressure control valve connected to said saturator, and
- iii. an exit flow control valve connected to said saturator, are located within said vacuum chamber,
- b. a vacuum pump connected to said vacuum chamber,
- c. an upper Stirling cooler in contact with an upper surface of said saturator, and
- d. a lower Stirling cooler in contact with a lower surface of said saturator
- e. an upper temperature PID control loop connected to:
- i. an upper temperature sensor located in said saturator, and
- ii. said upper Stirling cooler,
- f. a lower temperature PID control loop connected to:
- i. a lower temperature sensor located in said saturator, and
- ii. said lower Stirling cooler,
- g. a pressure PID control loop connected to said saturator pressure control valve,
- h. a flow PID control loop connected to said exit flow control valve, and
- B. prefilling said saturator with distilled water at atmospheric pressure,
- C. operating said vacuum pump to create a predetermined vacuum in said vacuum chamber,
- D. connecting a supply gas to a gas inlet connected to said humidity generator, and
- E. operating:
- a. said upper temperature PID control loop,
- b. said lower temperature PID control loop,
- c. said pressure PID control loop, and
- d. said flow PID control loop,
- according to predetermined setpoints, and
- F. whereby an exit gas is generated with a dewpoint between −90° C. and 10° C.
23 more elements
Dependencies are inferred from the claim text.