Target opening degree estimator and pressure adjustment vacuum valve
AssigneeShimadzu Corporation
InventorJunichiro KOZAKI
Life of this patent
Estimating the term…
Abstract
A target opening degree estimator estimates a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.
Claims8
A target opening degree estimator estimating a target opening degree estimation value as an opening degree of a valve element of a pressure adjustment vacuum valve when a pressure of a vacuum chamber connected to the pressure adjustment vacuum valve reaches a pressure adjustment target pressure based on a correlation between the opening degree of the valve element and the pressure of the vacuum chamber, a current opening degree, and a current pressure.
Dependencies are inferred from the claim text.